Research Review of Error Compensation Technology for Ultra-precision Machining
China Mechanical Engineering
2023, 34 (03):
Ultra-precision machining technology was a key technology in high-end manufacturing fields. At present, ultra-precision machining has entered the nano scale. Mastering the key technology of ultra-precision machining error control, ensuring and improving the machining accuracy of CNC machine tools, become a hot research point to improve the machining and manufacturing levels. This paper systematically summarized the research status and development trend of ultra-precision machining error compensation technology, and focused on the geometric errors, force induced errors, thermal induced errors and their compensation methods, which had the greatest impact on ultra-precision machining. Then, a series of problems of ultra-precision machining in geometric error separation, cutting force, thermal induced error measurement and compensation were deeply discussed, and it is further pointed out that the ultra-precision machining error compensation technology should also pay attention to the development direction of high efficiency, high precision, generalization, modularization, intelligence and flexibility.
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