关键词: 角位移传感器, 时栅, 双层, 感应强度, 误差

Abstract: Aiming at the problems of the small amplitude of the induction signals and the low utilization rate of the uniform effective area of the time-varying magnetic field of the double-layer time-grid angular displacement sensors developed in the early stage， a double-layer complementary time-grid angular displacement sensor was proposed based on the original “figure-eight” half-sine structure. According to the characteristics of the double-layer time-grid displacement sensors， the spatial magnetic field distribution models were established， and the advantages of the complementary structure of the double-layer time-grid angular displacement sensors in forming traveling waves were verified. According to the magnetic field distribution of the excitation coil， the space between the double-layer planar excitation coil under this parameter state was as 0.235 mm. Finally， finite element simulation analysis and experimental verification were carried out. The simulation results show that the complementary structure may effectively increase the induction signal intensity， the peak-to-peak values of the short-period errors are significantly reduced， which may effectively suppress the 1st harmonic and the 4th harmonic in the angle errors. The experimental data shows that the original short-period error of the sensors is （-13.61″， 13.30″）， and the corrected error is （-3.01″， 0.78″）； the original long-period error of the sensor is （-19.60″， 21.96″）， and the corrected error is （-2.62″， 3.30″）， which reduces the primary errors by 66.3% compared to the single-layer “U”-shaped structure， the 4th time error is reduced by 25.3%. 

Key words:  , angular displacement sensor, time grid, double layer, induction intensity, error