Abstract: Aiming at the problems of low discharge frequency, large pulse width, and high-efficiency erosion ability at the nanoscale difficult to meet the increasing demands which were common in traditional micro-EDM pulse generators, a VHF micro energy pulse generator was designed based on principle of circuit resonance. The open circuit voltage waveform with a discharge frequency of 55 MHz and a peak voltage of 220 V was generated by the VHF resonant pulse generator, and the voltage pulse width was compressed to 9.1ns. Discharge experiments under different open circuit voltages were carried out, and the discharge waveforms under various experimental conditions were obtained. The experimental results show that the VHF resonant pulse generator has good processing performance.

Key words: micro electrical discharge machining(micro-EDM), very high frequency(VHF), circuit resonance, recast layer, surface roughness

摘要： 针对传统微细电火花脉冲电源普遍存在的放电频率低、脉宽较大、纳米级高效蚀除能力难以日益提高的问题，设计出了一种基于电路共振原理的甚高频微能脉冲源,该脉冲源可产生放电频率55 MHz、电压峰峰值220 V的开路电压波形，电压脉宽可压缩至9.1 ns。进行了不同开路电压下的放电实验，获得了各实验条件下的放电波形。实验结果证明所设计的甚高频微能脉冲源具有良好的加工工艺性能。

关键词: 微细电火花加工, 甚高频, 电路共振, 重铸层, 表面粗糙度