中国机械工程 ›› 2026, Vol. 37 ›› Issue (6): 1371-1382.DOI: 10.3969/j.issn.1004-132X.2026.06.010
• 电子增材制造工艺及器件 • 上一篇
马帅印1,2,3(
), 张成豪1, 李家杰1, 吕景祥4, 蔡维5, 赵云贵6, 李超6, 尹恩怀6, 张映锋7(
)
收稿日期:2025-12-12
出版日期:2026-06-25
发布日期:2026-07-17
通讯作者:
张映锋
作者简介:马帅印,男,1990年生,副教授、硕士研究生导师。研究方向为大数据、人工智能、智能制造、绿色制造、预测与控制优化等。E-mail:masy@xupt.edu.cn基金资助:
MA Shuaiyin1,2,3(
), ZHANG Chenghao1, LI Jiajie1, LYU Jingxiang4, CAI Wei5, ZHAO Yungui6, LI Chao6, YIN Enhuai6, ZHANG Yingfeng7(
)
Received:2025-12-12
Online:2026-06-25
Published:2026-07-17
Contact:
ZHANG Yingfeng
摘要:
电子3D打印技术凭借其高分辨率制造特性、异质材料集成能力和定制化设计优势,为有机薄膜晶体管的先进制造范式提供了革命性解决方案。从工艺原理维度系统解析了喷墨打印、气溶胶喷射打印与直写成形三大主流技术的特征,定量对比了其成形精度极限、多相材料兼容性及工艺鲁棒性差异,进而探讨了制约各技术发展的关键挑战,并基于柔性显示、生物医学传感和可穿戴电子等创新应用场景,系统评述了3D打印有机薄膜晶体管器件在规模化生产中的结构-性能关系研究进展,指出制备材料的创新、打印工艺的调控优化及打印设备的可靠性评价是未来的重点研究方向。
中图分类号:
马帅印, 张成豪, 李家杰, 吕景祥, 蔡维, 赵云贵, 李超, 尹恩怀, 张映锋. 电子3D打印技术制备有机薄膜晶体管及其应用研究进展[J]. 中国机械工程, 2026, 37(6): 1371-1382.
MA Shuaiyin, ZHANG Chenghao, LI Jiajie, LYU Jingxiang, CAI Wei, ZHAO Yungui, LI Chao, YIN Enhuai, ZHANG Yingfeng. Research Progresses in Preparation of Organic Thin Film Transistors by Electronic 3D Printing Technology and Its Applications[J]. China Mechanical Engineering, 2026, 37(6): 1371-1382.
| 对比维度 | 喷墨打印 | 微笔直写 | 气溶胶喷射打印 |
|---|---|---|---|
| 流体挤出机制 | 压电/热泡式按需滴落 | 气动/机械挤出连续丝线 | 空气动力学聚焦雾化流 |
| 典型分辨率/线宽 | 20~50 μm | 10~200 μm | 10 μm及以下 |
| 适用墨水黏度要求 | 严格且极低(1~20 MPa·s) | 极宽且偏高(102~106 MPa·s) | 较宽(1~1000 MPa·s) |
| 多材料兼容性 | 较弱(易发生喷头堵塞与咖啡环效应) | 极强(兼容高黏度凝胶、弹性体、浆料) | 强(兼容聚合物溶液、纳米颗粒分散液) |
| 基底形貌适应性 | 仅适用于平整或微小曲率基底 | 适用于平面及三维支撑结构的堆叠 | 极佳(非接触式共形打印,适应复杂3D曲面) |
| 典型OTFT制备层 | 有源层(半导体)、低黏度介电层 | 高黏度凝胶电解质、厚膜电极、柔性基座 | 高分辨率源漏电极、超薄精细介电层 |
| 核心优势 | 速度快、材料利用率高、大面积阵列化成熟 | 三维空间堆叠能力强、支持高浓度功能浆料 | 分辨率极高、无喷头堵塞风险、超强保形能力 |
| 主要局限与挑战 | 墨水配制壁垒高、界面润湿性控制极难 | 打印速度慢、剪切力易破坏高分子链段 | 设备成本高昂、存在“过喷”散射现象 |
表1 三种主流电子3D打印技术制备OTFT的综合参数对比[45]
Tab.1 Comprehensive parameter comparison of three mainstream electronic 3D printing technologies for fabricating OTFT[45]
| 对比维度 | 喷墨打印 | 微笔直写 | 气溶胶喷射打印 |
|---|---|---|---|
| 流体挤出机制 | 压电/热泡式按需滴落 | 气动/机械挤出连续丝线 | 空气动力学聚焦雾化流 |
| 典型分辨率/线宽 | 20~50 μm | 10~200 μm | 10 μm及以下 |
| 适用墨水黏度要求 | 严格且极低(1~20 MPa·s) | 极宽且偏高(102~106 MPa·s) | 较宽(1~1000 MPa·s) |
| 多材料兼容性 | 较弱(易发生喷头堵塞与咖啡环效应) | 极强(兼容高黏度凝胶、弹性体、浆料) | 强(兼容聚合物溶液、纳米颗粒分散液) |
| 基底形貌适应性 | 仅适用于平整或微小曲率基底 | 适用于平面及三维支撑结构的堆叠 | 极佳(非接触式共形打印,适应复杂3D曲面) |
| 典型OTFT制备层 | 有源层(半导体)、低黏度介电层 | 高黏度凝胶电解质、厚膜电极、柔性基座 | 高分辨率源漏电极、超薄精细介电层 |
| 核心优势 | 速度快、材料利用率高、大面积阵列化成熟 | 三维空间堆叠能力强、支持高浓度功能浆料 | 分辨率极高、无喷头堵塞风险、超强保形能力 |
| 主要局限与挑战 | 墨水配制壁垒高、界面润湿性控制极难 | 打印速度慢、剪切力易破坏高分子链段 | 设备成本高昂、存在“过喷”散射现象 |
图13 基于气溶胶喷射打印的柔性晶体管用于SARS-CoV-2抗原即时检测[51]
Fig.13 Flexible transistors based on aerosol jet printing for real-time detection of SARS-CoV-2 antigens[51]
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