Design and Experiments of Bonded-type Disc Stator M-DOF Ultrasonic Motors

doi:10.3969/j.issn.1004-132X.2025.01.004

Abstract

Abstract: In order to solve the problems such as low positioning accuracy, large structural dimensions, and difficulty in applying pre-pressure, which were commonly found in M-DOF ultrasonic motors, a novel bonded-type disc stator M-DOF ultrasonic motor was proposed. Firstly, finite element simulations were carried out to verify the working principles of the disc stator and determine the geometry. Then, the disk stator was fabricated and tested for the impedance characteristics and vibration characteristics. Finally, the prototype of the M-DOF ultrasonic motor was assembled, and the mechanics performance characteristics were evaluated experimentally. The experimental results show that both of the start/stop response time of the prototype are less than 20 ms, and the angular displacement resolutions are less than 30 μrad respectively. The prototype has the advantages such as rapid response and high positioning accuracy.

Key words: , ultrasonic motor, multi-degrees-of-freedom(M-DOF), disc stator, preload structure, modal coupling

摘要： 为解决多自由度超声电机普遍存在的定位精度低、结构尺寸大和预压力难以施加等问题，设计了一种新型贴片式圆盘定子多自由度超声电机。首先使用有限元方法验证了圆盘定子的工作原理并确定其几何尺寸;然后制作了圆盘定子并测试其阻抗特性和振动特性;最后组装了原理样机并对其机械输出特性进行了实验评估。实验结果表明，原理样机的启/停响应时间均在20 ms以内，角位移分辨率均小于30 μrad，具有响应迅速和定位精度高的优点。

关键词: 超声电机, 多自由度, 圆盘定子, 预压力结构, 模态耦合

CLC Number:

TM35

PAN Zhiyong, WANG Liang, JIN Jiamei, QIU Jianmin, FENG Haoren. Design and Experiments of Bonded-type Disc Stator M-DOF Ultrasonic Motors[J]. China Mechanical Engineering, 2025, 36(01): 38-46,58.

潘志泳, 王亮, 金家楣, 邱建敏, 冯浩人. 贴片式圆盘定子多自由度超声电机的设计与实验[J]. 中国机械工程, 2025, 36(01): 38-46,58.

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