Experimental Study of Laser Assisted Water Jet Micromilling of Single Crystal β-Ga2O3 Substrates
TIAN Long, HUANG Chuanzhen, LIU Dun , YAO Peng , LIU Hanlian, LIU Xuefei
China Mechanical Engineering . 2023, (13): 1559 -1567 .  DOI: 10.3969/j.issn.1004-132X.2023.13.005

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