<span style="color:#337FE5;">[</span> <span style="color:#337FE5;font-family:Arial, "font-size:16px;font-weight:700;background-color:#FFFFFF;">质量优化</span> <span style="color:#337FE5;">]</span>数据驱动的晶圆图缺陷模式识别方法

Data Driven Wafer Pattern Defect Pattern Recognition Method

YANG Zhenliang, WANG Junliang, ZHANG Jie, JIANG Xiaokang

China Mechanical Engineering . 2019, (02): 230 -236 .