[1]汪俊亮, 秦威, 张洁.基于数据挖掘的晶圆制造交货期预测方法[J]. 中国机械工程, 2016, 27(1):105-108.
WANG Junliang,QIN Wei,ZHANG Jie. Data Mining for Orders' LT Forecasting in Wafer Fabrication[J]. China Mechanical Engineering, 2016,27(1):105-108.
[2]HANSEN M H, NAIR V J, FRIEDMAN D J. Monitoring Wafer Map Data from Integrated Circuit Fabrication Process for Spatially Clustered Defects[J].Technometrics, 1997,39(3):241-253.
[3]KAEMPF U. The Binomial Test: a Simple Tool to Identify Process Problems[J]. IEEE Transactions on Semiconductor Manufacturing,1995,8(2):160-166.
[4]FRIEDMAN D J, HANSEN M H, NAIR V N, et al. Model-free Estimation of Defect Clustering in Integrated Circuit Fabrication[J].IEEE Transactions on Semiconductor Manufacturing,1997,10(3):344-359.
[5]HARALICK R M, SHAPIROS L G.Computer and Robot Vision[M]. Boston: Addison-Wesley, 1993:28-48.
[6]TAN Y S, ZHOU X M. Research on the Statistical Characteristics of the Unipixel Gray Value of Natural Images[J].Computer Engineering & Science, 2004, 26(3):42-46.
[7]GONZALEZ R C, WOODS R E.Digital Image Processing[M].3rd ed. Harlow:Prentice-Hall, 2008.
[8]WU M J, JANG J S R, CHEN J L. Wafer Map Failure Pattern Recognition and Similarity Ranking for Large-scale Data Sets[J].IEEE Transactions on Semiconductor Manufacturing, 2015, 28(1): 1-12.
[9]邡鑫,史峥.晶圆缺陷检测与分类的卷积神经网络[J/OL].计算机工程:1-5 [2018-05-31].http://kns.cnki.net/kcms/detail/31.1289.TP.20170907.1450.006.html.
FANG Xin,SHI Jun. Convolutional Neural Networks for Wafer Defect Detection and Classification[J/OL].Computer Engineering:1-5[2018-05-31].http://kns.cnki.net/kcms/detail/31.1289.TP.20170907.1450.006.html.
[10]GOODFELLOW I J, POUGET-ABADIE J, MIRZA M, et al. Generative Adversarial Networks[J]. Advances in Neural Information Processing Systems, 2014, 3:2672-2680.
[11]WANG C H. Recognition of Semiconductor Defect Patterns Using Spectral Clustering[J]. Expert Systems with Applications,2008, 34(3):1914-1923.
[12]KEYS R.Cubin Convolution Interpolation for Digital Image Processing[J].IEEE Transactions on Acoustics, Speech, and Signal Processing, 1981,29, (6):1153-1159.
[13]SPRINGENBERG J T. Unsupervised and Semi-Supervised Learning with Categorical Generative Adversarial Networks[C]//International Conference of Learning Representation.San Juan,2015:1-20. |