Dynamics Modeling and Simulation of FROG-LEG Vacuum Manipulator
Huang Yuchuan1,2;Qu Daokui1,3;Xu Fang1,3
1.State Key Laboratory of Robotics,Shenyang Institute of Automation,the Chinese Academy of Sciences, Shenyang,110016
2.Graduate School of the Chinese Academy of Sciences,Beijing,100049
3.SIASUN Robot & Automation Co.,Ltd.,Shenyang,110168
Online:2014-02-25
Published:2014-03-05
Supported by:
National Science and Technology Major Project ( No. 2009ZX02012)
[1]Quirk M,Serda J.半导体制造技术[M]. 韩郑生,译. 北京:电子工业出版社,2009.
[2]Cong M,Zhou Y, Jiang Y. An Automated Wafer-handling System Based on the Integrated Circuit Equipments[C]//IEEE International Conference on Manipulatorics and Biomimetics. Shatin,2005:240-245.
[3]Takashi Katsuma. Vacuum Manipulator for Semiconductor Manufacturing Equipment[J].Industrial Robot,2002,29(4):324-328.
[4]Chiaki Tsuzuku. The Trend of Robot Technology in Semiconductor and LED Industry[J]. Industrial Robot,2001, 28(5):406-413.
[5]丛明,于旭,徐晓飞.硅片传输机器人的发展及研究现状[J].机器人技术与应用,2007(4):18-23.
Cong Ming,Yu Xu,Xu Xiaofei. Development and Research State of Wafer Transfer Robot[J]. Robot Technique and Application,2007(4):18-23.
[6]宋伟刚.机器人机械系统原理理论、方法和算法[M].北京:机械工业出版社,2007.
[7]Craig J J. 机器人学导论[M].贠超,译.3版.北京:机械工业出版社,2006.
[8]黄晓华,王兴成.机器人动力学的李群表示及其应用[J].中国机械工程,2007,18(2):201-205.
Huang Xiaohua,Wang Xingcheng. Lie Group Represetation of Robot Dynamic and Its Application[J]. China Mechanical Engineering,2007,18(2):201-205.
[9]Ozaki K,Fujiwara T. An Experimental Study of High Speed Single Stage Magnetic Fluid Seals[J]. Journal of Magnetism and Magnetic Materials,1987,65(2):382-384.