Study on Layer-by-layer Electrostatic Self-assembly Composite Abrasives Slurry and Its Silicon Wafer CMP Performance
Yao Weiqiang;Ma Guowei;Jin Qingbo;Huang Yishen;Zhao Binshan;Xu Xuefeng
Key Laboratory of Special Purpose Equipment and Advanced Manufacturing Technology,Ministry of Education,Zhejiang University of Technology,Hangzhou,310014
Online:2013-03-25
Published:2013-04-08
Supported by:
Zhejiang Provincial Natural Science Foundation of China(No. Z1080625)
静电层层自组装复合磨粒及抛光液的抛光性能研究
姚伟强;马国伟;金清波;黄亦申;赵彬善;许雪峰
浙江工业大学特种装备制造与先进加工技术教育部重点实验室,杭州,310014
基金资助:
浙江省自然科学基金资助重点项目(Z1080625)
Zhejiang Provincial Natural Science Foundation of China(No. Z1080625)
TAO Wei-Jiang, MA Guo-Wei, JIN Qing-Bei, HUANG Yi-Shen, DIAO Ban-Shan, HU Xue-Feng. Study on Layer-by-layer Electrostatic Self-assembly Composite Abrasives Slurry and Its Silicon Wafer CMP Performance[J]. China Mechanical Engineering, 2013, 24(6): 742-745,780.
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