Research Situation and Trend of Mechanical Testing of Micro Structures

Abstract

Abstract:

This paper firstly presented the recent research situations in the micromechanics testing technique and the problems in characterization of mechanics properties. Then the techniques about actuators, micro displacement sensors, and micro force sensors were discussed and compared respectively as they were main parts in microscale mechanics testing.

Key words: MEMS, mechanics property, actuator, micro displacement sensor, micro force sensor

摘要：

阐述了微构件力学性能的研究现状与存在的力学性能参数表征问题，而后重点介绍了微构件力学性能测试中相关的驱动方式、微位移检测和微力检测技术。

关键词: 微机电系统, 力学性能, 驱动, 微位移检测, 微力检测

CLC Number:

TB93

Chu Jinkui, Zhang Duanqin. Research Situation and Trend of Mechanical Testing of Micro Structures[J]. China Mechanical Engineering, 2007, 18(19): 2383-2387.

褚金奎, 张段芹. 微构件力学性能测试技术进展[J]. 中国机械工程, 2007, 18(19): 2383-2387.

[1]	NI Jing, CUI Zhi, HE Lihua, FU Xin, ZHU Zefei. State-of-the-Art of Cutting Technology and Applications of PTFE [J]. China Mechanical Engineering, 2024, 35(03): 498-514.
[2]	TWANG Wei, MA Qianlun, BAI Zhenhua, WANG Ziang. Mechanics Property Prediction of Cold Rolled High Strength Steel Coils Based on GBD#br# [J]. China Mechanical Engineering, 2023, 34(18): 2222-2229.
[3]	LIU Ying, CHEN Yue, ZHAO Xueli, YU Tongmin, ZHU Tieli, . Study on Properties of Ultrasonic-assisted Injection Molding of Carbon Fiber-reinforced Polypropylene Parts [J]. China Mechanical Engineering, 2023, 34(16): 1975-1981.
[4]	LI Guangjun, DUAN Hong, XU Lei, KAN Chen, LIU Zhongliang, GAO Xiaodong. Research on Friction and Wear Behaviors of Al7.8Co20.6Cr12.2Fe11.5Ni40.7Ti7.2 High-entropy Superalloy [J]. China Mechanical Engineering, 2023, 34(13): 1568-1575.
[5]	HE Qingchuan, LIU Hui, PAN Jun, CHEN Wenhua. Detecting Internal Leakage in Electro-Hydraulic Actuators Based on Operational States of Motor [J]. China Mechanical Engineering, 2023, 34(12): 1407-1414.
[6]	ZHOU Houming, CHEN Haoyue, LI Shengui. Preparation and Mechanics Properties of Al2O3/ZrO2 Ceramic Tool Materials Based on Gradient Structure [J]. China Mechanical Engineering, 2023, 34(10): 1199-1207.
[7]	GAO Kai, LI Kun, GU Hongli, . Effects of Amount of Galvanization on Microstructure and Mechanics Properties of Joints Made by Induction-pressure Welding of Low Alloy Steel/5052 Aluminum Alloy [J]. China Mechanical Engineering, 2023, 34(10): 1220-1229.
[8]	YANG Shuo, ZHANG Jie, KONG Ning, WANG Haowei, WANG Xiaoyu, ZHUANG Yuan. Deformation Law　Model and Simulation Verification of Pod Structures with Large Exhibition-to-receive Ratio for Aerospace Applications [J]. China Mechanical Engineering, 2023, 34(07): 780-788.
[9]	FAN Xinyu, WANG Peng, YIN Jie, ZHU Yanbing. Multi-mode Coordination Control of a Novel Compound Electromagnetic Linear Actuator [J]. China Mechanical Engineering, 2023, 34(03): 292-299.
[10]	ZHANG Yan, HUANG Chuanzhen, LIU Hanlian. Sintering and Mechanics Properties of C3N4 Based Ceramic Tool Materials [J]. China Mechanical Engineering, 2023, 34(03): 352-358，368.
[11]	LU Youjun, SONG Di, MIAO Changqing. An Actuating Response Model of Temperature-controlled SMA Actuators [J]. China Mechanical Engineering, 2023, 34(02): 157-163.
[12]	FANG Xuewei, JIANG Xiao, WANG Zhe, WU Xiaokang, HUANG Ke. Forming Process Optimization of Wire and Arc Additive Manufactured High-strength Steel ER120S-G [J]. China Mechanical Engineering, 2023, 34(02): 218-225.
[13]	YIN Haibin, TAO Jian, LI Qian, ZHOU Jia, . Analysis on Grasping Ability for a Soft Robotic Hand with Structural Decoupling of Actuator and Variable Stiffness Mechanisms [J]. China Mechanical Engineering, 2023, 34(01): 27-35.
[14]	JIANG Chuangyu, ZHANG Baoqiang, CHEN Yun, WANG Cunfu, LUO Huageng, HU Jiexiang, CAO Longchao. Study on Mechanics Properties and Numerical Convergence of Gyroid Cellular Structures [J]. China Mechanical Engineering, 2022, 33(23): 2790-28000.
[15]	JIAO Chen, CHAO Long, ZHU Lei, SHEN Lida, LIANG Huixin, DAI Ning, WANG Changjiang, SUN Jun. Design and Manufacture Method of Bionic Porous Structures for Orthopedic Implants [J]. China Mechanical Engineering, 2022, 33(23): 2844-2850.

Research Situation and Trend of Mechanical Testing of Micro Structures

微构件力学性能测试技术进展

PDF

Knowledge

Abstract

Cite this article

share this article

References

Related Articles 15

Recommended Articles

Metrics