Abstract:

A simple and rapid method for fabricating the mold for polydimethylsiloxane(PDMS)microfluidic chip was presented. Polymethylmethacrylate(PMMA) mould was performed quickly by hot embossing on glass substrate with groove structure fabricated by photolithography and wet etching, and PDMS microfluidic chips can be replicated from these PMMA moulds. The SEM and optical microscope images show the microstructure in the PMMA molds and PDMS chips has low relative standard deviation (RSD) values.

Key words: microfluidic chip, mold, PMMA, hot imbossing

摘要：

提出了一种微流控芯片模具的快速批量制作方法。应用光刻与湿法腐蚀技术制作玻璃母模，然后采用热压成形技术批量制作聚甲基丙烯酸甲酯（PMMA）阳模，再利用阳模浇模、键合批量制作聚二甲基硅氧烷（PDMS）微流控芯片。结果表明，该法制作的PMMA模具及复制得到的PDMS芯片平整度好、一致性高，其沟道宽度和深度的相对标准偏差分别小于0.5%和1.5%。

关键词: 微流控芯片, 模具, 聚甲基丙烯酸甲酯（PMMA）, 热压法