气浮支承, 动力学, 双层气浮平台, 同步特性

The problem how to design the dynamics parameters of aerostatic bearings was investigated. The general dynamics characteristics of aerostatic bearings were analyzed, and the dynamical design principles of aerostatic bearings for reducing the synchronization error of dual-stages were proposed. Then, two dynamics designs of aerostatic bearings of dual-stages were given to describe these principles. It is concluded that many factors need to be considered in the design of aerostatic bearings, including load-capacity, stiffness and damping etc, and the design principles that the aerostatic bearings nature frequency should be away from working frequencies and structure frequencies so as to avoid resonance. When the dual-stages require the synchronization, the natural frequencies of aerostatic bearings should be equal to each other, so that the stages have the same dynamics performance and the same response characteristics for driving instructions and interference to ensure the synchronization accuracy of dual-stages.