To solve the problems that the assembly process planning of micro-device products relies on manual experience heavily, a knowledge-driven fine-grained micro-device assembly process planning method was proposed. And a micro-device assembly process decision software integrating product and system knowledge was developed. This planning method took the resource constraints of the assembly systems into account, and planned the assembly processes of micro-devices from process, steps, and process parameters. Based on interval-type hesitant fuzzy entropy, a mixed attribute matching weight parameter determination method ensured the effectiveness of the process decision algorithm. The developed decision system realized rapid decision-making of the assembly processes of micro-device products.