China Mechanical Engineering ›› 2025, Vol. 36 ›› Issue (10): 2207-2214.DOI: 10.3969/j.issn.1004-132X.2025.10.006
Wenqian LI1,2,3,4(
), Zhanqiang LIU1,2,4,5(
), Jinfu ZHAO1,2,3,4, Bing WANG1,2,3,4, Yukui CAI1,2,3,4
Received:2024-06-05
Online:2025-10-25
Published:2025-11-05
Contact:
Zhanqiang LIU
李文倩1,2,3,4(
), 刘战强1,2,4,5(
), 赵金富1,2,3,4, 王兵1,2,3,4, 蔡玉奎1,2,3,4
通讯作者:
刘战强
作者简介:李文倩,女,2002年生,硕士研究生。研究方向为长寿命密封表面的设计与加工。E-mail:sduliwenqian@mail.sdu.edu.cn基金资助:CLC Number:
Wenqian LI, Zhanqiang LIU, Jinfu ZHAO, Bing WANG, Yukui CAI. Nanosecond Laser Machining of Spiral Grooves of Dry Gas Seal Rotational Ring Surfaces[J]. China Mechanical Engineering, 2025, 36(10): 2207-2214.
李文倩, 刘战强, 赵金富, 王兵, 蔡玉奎. 干气密封动环表面的螺旋槽纳秒激光制备[J]. 中国机械工程, 2025, 36(10): 2207-2214.
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URL: https://www.cmemo.org.cn/EN/10.3969/j.issn.1004-132X.2025.10.006
| 参数 | 值 |
|---|---|
化学成分 (质量分数)/% | Ni:52.03;Cr:18.53;Nb:5.33;Mo:3.09;Ti:0.96;Al:0.58;C:0.03;Co:0.01 |
| 密度 | 8.19 |
| 硬度 | 432HBW |
Tab.1 GH4169 specimen material properties
| 参数 | 值 |
|---|---|
化学成分 (质量分数)/% | Ni:52.03;Cr:18.53;Nb:5.33;Mo:3.09;Ti:0.96;Al:0.58;C:0.03;Co:0.01 |
| 密度 | 8.19 |
| 硬度 | 432HBW |
组 号 | 激光 功率 P/W | 扫描速度 v/(mm·s-1) | 重复 频率 f/kHz | 填充 间距 s/mm | 槽深 hg/μm | 槽底 粗糙度 Ra/μm |
|---|---|---|---|---|---|---|
| 1 | 15 | 30 | 50 | 0.005 | 5.720 | 0.915 |
| 2 | 15 | 40 | 60 | 0.01 | 3.500 | 0.795 |
| 3 | 15 | 50 | 70 | 0.013 | 2.430 | 0.911 |
| 4 | 18 | 30 | 60 | 0.013 | 6.334 | 0.791 |
| 5 | 18 | 40 | 70 | 0.005 | 6.419 | 0.796 |
| 6 | 18 | 50 | 50 | 0.01 | 6.426 | 0.912 |
| 7 | 21 | 30 | 70 | 0.01 | 10.454 | 0.740 |
| 8 | 21 | 40 | 50 | 0.013 | 13.684 | 1.029 |
| 9 | 21 | 50 | 60 | 0.005 | 7.413 | 0.928 |
Tab.2 Orthogonal test parameters and measurement results
组 号 | 激光 功率 P/W | 扫描速度 v/(mm·s-1) | 重复 频率 f/kHz | 填充 间距 s/mm | 槽深 hg/μm | 槽底 粗糙度 Ra/μm |
|---|---|---|---|---|---|---|
| 1 | 15 | 30 | 50 | 0.005 | 5.720 | 0.915 |
| 2 | 15 | 40 | 60 | 0.01 | 3.500 | 0.795 |
| 3 | 15 | 50 | 70 | 0.013 | 2.430 | 0.911 |
| 4 | 18 | 30 | 60 | 0.013 | 6.334 | 0.791 |
| 5 | 18 | 40 | 70 | 0.005 | 6.419 | 0.796 |
| 6 | 18 | 50 | 50 | 0.01 | 6.426 | 0.912 |
| 7 | 21 | 30 | 70 | 0.01 | 10.454 | 0.740 |
| 8 | 21 | 40 | 50 | 0.013 | 13.684 | 1.029 |
| 9 | 21 | 50 | 60 | 0.005 | 7.413 | 0.928 |
| 参数 | 激光功率的重要程度 | 扫描速度的 重要程度 | 重复频率的 重要程度 | 填充间距 的 重要程度 |
|---|---|---|---|---|
| 11.650 | 22.508 | 25.830 | 19.552 | |
| 19.179 | 23.603 | 17.247 | 20.380 | |
| 31.551 | 16.269 | 19.303 | 22.448 | |
| 3.880 | 7.503 | 8.610 | 6.517 | |
| 6.393 | 7.868 | 5.749 | 6.793 | |
| 10.517 | 5.423 | 6.434 | 7.483 | |
| R | 6.637 | 2.445 | 2.861 | 0.966 |
Tab.3 Mean and extreme variance analysis of slot depths
| 参数 | 激光功率的重要程度 | 扫描速度的 重要程度 | 重复频率的 重要程度 | 填充间距 的 重要程度 |
|---|---|---|---|---|
| 11.650 | 22.508 | 25.830 | 19.552 | |
| 19.179 | 23.603 | 17.247 | 20.380 | |
| 31.551 | 16.269 | 19.303 | 22.448 | |
| 3.880 | 7.503 | 8.610 | 6.517 | |
| 6.393 | 7.868 | 5.749 | 6.793 | |
| 10.517 | 5.423 | 6.434 | 7.483 | |
| R | 6.637 | 2.445 | 2.861 | 0.966 |
| 参数 | 激光功率的重要程度 | 扫描速度的重要程度 | 重复频率的重要程度 | 填充间距的重要程度 |
|---|---|---|---|---|
| 2.621 | 2.446 | 2.856 | 2.639 | |
| 2.499 | 2.331 | 2.514 | 2.447 | |
| 2.697 | 2.751 | 2.447 | 2.731 | |
| 0.874 | 0.815 | 0.952 | 0.880 | |
| 0.833 | 0.777 | 0.838 | 0.816 | |
| 0.899 | 0.917 | 0.816 | 0.910 | |
| R | 0.066 | 0.140 | 0.136 | 0.094 |
Tab.4 Mean and extreme variance analysis of roughness of groove bottom
| 参数 | 激光功率的重要程度 | 扫描速度的重要程度 | 重复频率的重要程度 | 填充间距的重要程度 |
|---|---|---|---|---|
| 2.621 | 2.446 | 2.856 | 2.639 | |
| 2.499 | 2.331 | 2.514 | 2.447 | |
| 2.697 | 2.751 | 2.447 | 2.731 | |
| 0.874 | 0.815 | 0.952 | 0.880 | |
| 0.833 | 0.777 | 0.838 | 0.816 | |
| 0.899 | 0.917 | 0.816 | 0.910 | |
| R | 0.066 | 0.140 | 0.136 | 0.094 |
| [1] | 毛文元, 宋鹏云, 邓强国, 等. 螺旋槽底表面粗糙度对干气密封性能的影响 [J]. 润滑与密封, 2017, 42 (1): 27-33. |
| MAO Wenyuan, SONG Pengyun, DENG Qiangguo, et al. Influence of Surface Roughness of Spiral Groove Bottom on Dry Gas Sealing Performance[J]. Lubrication and Sealing, 2017, 42 (1): 27-33. | |
| [2] | MAO Bo, SIDDAIAH A, LIAO Yiliang, et al. Laser Surface Texturing and Related Techniques for Enhancing Tribological Performance of Engineering Materials: a Review[J]. Journal of Manufacturing Processes, 2020, 53: 153-173 . |
| [3] | 王衍, 于雪梅, 卢龙, 等.非接触式机械密封表面开槽技术研究现状 [J]. 液压气动与密封, 2016, 36 (11): 1-6. |
| WANG Yan, YU Xuemei, LU Long, et al. Research Status of Non-contact Mechanical Seal Surface Grooving Technology[J]. Hydraulic Pneumatic and Seal,2016, 36 (11): 1-6. | |
| [4] | MARTÍNEZ S, LAMIKIZ A, UKAR E, et al. Analysis of the Regimes in the Scanner-based Laser Hardening Process[J]. Optics and Lasers in Engineering,2017, 90: 72-80. |
| [5] | ZHAO Wanqin, WANG Lingzhi, YU Zhishui, et al. A Processing Technology of Grooves by Picosecond Ultrashort Pulse Laser in Ni Alloy: Enhancing Efficiency and Quality[J]. Optics and Laser Technology, 2019, 111: 214-221. |
| [6] | DOU J, CUI J, FANG X, et al. Theoretical and Experimental Study on Machining Rectangular Microgroove of Diamond by Femtosecond Laser[J]. Integrated Ferroelectrics, 2020, 208 (1): 104-116. |
| [7] | HU Tianrui, YUAN Songmei, WEI Jiayong, et al. Micro-grooves Machining and Optimizing on SiC/SiC Composites by Femtosecond Laser-based on Response Surface Methodology[J]. Ceramics International, 2024, 50 (1PB): 1665-1682. |
| [8] | DHAKER L K, PANDEY K A. Particle Swarm Optimisation of Hole Quality Characteristics in Laser Trepan Drilling of Inconel 718[J]. Defence Science Journal, 2019, 69(1): 37-45. |
| [9] | NAVEED A, MADIHA R, SALMAN P, et al. Controlling the Material Removal and Roughness of Inconel 718 in Laser Machining[J]. Materials and Manufacturing Processes,2019,34(10):1169-1181. |
| [10] | DENKENA B, GROVE T, KRÖDEL A, et al. Increased Performance in High Speed Turning of Inconel 718 by Laser Structuring of Pcbn Tools[J]. Procedia CIRP, 2018, 77:602-605. |
| [11] | AVADHOOT R, SATISH C. Experimental Investigation on Laser-processed Micro-dimple and Micro-channel Textured Tools during Turning of Inconel 718 Alloy[J]. Journal of Materials Engineering and Performance,2022,31(5):1-16. |
| [12] | 毛文元, 宋鹏云, 邓强国, 等.干气密封螺旋槽的激光加工工艺研究 [J]. 工程科学与技术,2018, 50 (5): 253-262. |
| MAO Wenyuan, SONG Pengyun, DENG Qiangguo, et al. Research on Laser Machining Process of Spiral Groove of Dry Gas Seal[J]. Engineering Science and Technology, 2018, 50 (5): 253-262. | |
| [13] | 毛文元, 刘小磊, 陈硕, 等. 纳秒激光加工机械密封动压槽的槽深计算及实验验证 [J]. 中国激光, 2023, 50 (12): 269-276. |
| MAO Wenyuan, LIU Xiaolei, CHEN Shuo, et al. Calculation and Experimental Validation of Groove Depth for Nanosecond Laser Machining of Dynamic Pressure Grooves in Mechanical Seals[J]. China Laser, 2023, 50 (12): 269-276. | |
| [14] | 毛文元, 宋鹏云, 邓强国, 等. 干气密封螺旋槽激光加工工艺的ACE法优化 [J]. 工程科学与技术, 2021, 53 (2): 195-202. |
| MAO Wenyuan, SONG Pengyun, DENG Qiangguo, et al. Optimization of Laser Machining Process of Dry Gas Seal Spiral Groove by ACE Method[J]. Engineering Science and Technology, 2021, 53 (2): 195-202. | |
| [15] | 王衍, 王英尧, 肖喻丰, 等. 基于有序造型设计的干气密封超快激光精密加工 [J]. 材料导报, 2022, 36 (5): 44-52. |
| WANG Yan, WANG Yingyao, XIAO Yufeng, et al. Ultrafast Laser Precision Machining of Dry Gas Seals Based on Ordered Modeling Design [J]. Materials Guide, 2022, 36 (5): 44-52. | |
| [16] | 王衍, 孔康杰, 何一鸣, 等. 干气密封端面型槽可控激光制备的参数模型及实验验证[J]. 湖南大学学报(自然科学版), 2023, 50 (10): 142-150. |
| WANG Yan, KONG Kangjie, HE Yiming, et al. Parametric Modeling and Experimental Validation of Controlled Laser Preparation of Dry Gas Seal End Face Grooves[J]. Journal of Hunan University (Natural Science Edition), 2023, 50 (10): 142-150. | |
| [17] | 焦浩文, 陈冰, 罗良, 等.纳秒激光加工2.5维Cf/SiC复合材料的烧蚀孔洞特征 [J]. 中国机械工程, 2020, 31 (8): 983-990. |
| JIAO Haowen, CHEN Bing, LUO Liang, et al. Ablation Hole Characterization of 2.5-Dimensional Cf/SiC Composites Processed by Nanosecond Laser[J]. China Mechanical Engineering,2020, 31 (8): 983-990. | |
| [18] | 马桂英, 陈晓晓, 陈涛, 等. 基于双向光斑重叠率调控的耦合激光抛光碳化硅陶瓷的表面质量研究 [J]. 中国激光, 2023, 50 (16): 186-197. |
| MA Guiying, CHEN Xiaoxiao, CHEN Tao, et al. Surface Quality of Coupled Laser-polished Silicon Carbide Ceramics Based on Bidirectional Spot Overlap Rate Modulation[J]. China Laser, 2023, 50 (16): 186-197. | |
| [19] | 肖蒲庐, 陈观华, 陈宇, 等.飞秒激光织构钛合金表面形貌及润湿性研究 [J]. 中国激光, 2023, 50 (16): 175-185. |
| XIAO Pulu, CHEN Guanhua, CHEN Yu, et al. Femtosecond Laser Structuring of Titanium Alloy Surface Morphology and Wettability[J]. China Laser, 2023, 50 (16): 175-185. | |
| [20] | 符永宏, 顾亚励, 康正阳, 等.硬质合金激光毛化工艺试验研究 [J]. 激光技术, 2016, 40 (4): 512-515. |
| FU Yonghong, GU Yali, KANG Zhengyang, et al. Experimental Study on Laser Burring Process of Cemented Carbide[J]. Laser Technology, 2016, 40 (4): 512-515. | |
| [21] | 何婉盈,姚鹏,褚东凯,等.钛表面微凹凸织构的激光加工及其细胞黏附研究[J].中国激光,2022,49(10):258-272. |
| HE Wanying, YAO Peng, Chu Dongkai, et al. Laser Processing of Titanium Surface Micro-convex Weave and its Cell Adhesion[J]. China Laser, 2022, 49(10): 258-272. | |
| [22] | 韩源, 马玉平, 王海航, 等.飞秒激光刻蚀纳米金刚石涂层材料去除率的研究 [J]. 激光与光电子学进展, 2021, 58 (11): 247-255. |
| HAN Yuan, MA Yuping, WANG Haihang, et al. Femtosecond Laser Etching of Nanodiamond Coating Material Removal Rate[J]. Advances in Lasers and Optoelectronics, 2021, 58 (11): 247-255. |
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