Linear Hydrodynamic Polishing of Copper Substrates Based on Composite Structure Polishing Tools

doi:10.3969/j.issn.1004-132X.2026.03.004

Abstract

Abstract:

To improve the surface morphology of copper substrates， a design method was proposed for composite structure polishing tools. Based on the principle of linear hydrodynamic pressure and material removal model， numerical simulation analyses of hydrodynamic pressure flow field characteristics were carried out to verify the accuracy of simulation data and clarify the influences of processing parameters of copper substrate linear hydrodynamic pressure polishing on surface morphology. Results show that composite structures have a higher mean hydraulic pressure and smaller standard deviation than that of single spiral structures， non-uniform groove width structures， and variable thickness structures. Composite structures combine the advantages of high material removal rate of spiral structures， good surface morphology uniformity of non-uniform groove width structures， and variable thickness structures during polishing. The surface roughness parameters Sa， Sq， and PV are optimized to 4.778 nm， 6.086 nm， and 9.900 nm， respectively， when the processing parameters are set as follows： polishing time of 45 min， polishing speed of 24 000 r/min， and polishing gap of 20 μm.

Key words: linear hydrodynamic polishing, composite structure, surface morphology, hydraulic pressure

摘要：

为改善铜衬底表面形貌，提出复合结构抛光工具的设计方法。依据线性液动压原理以及材料去除模型，进行液动压力流场特性的数值模拟分析，验证模拟数据的准确性，厘清铜衬底线性液动压抛光加工工艺参数对表面形貌的影响规律。研究表明：复合结构比单一的螺旋结构、不等距槽宽结构、变厚度结构液动压力均值更大、标准差更小，复合结构综合了螺旋结构材料去除率高、不等距槽宽结构和变厚度结构抛光表面形貌均匀性好的优点；工艺参数为抛光时间45 min、抛光转速24 000 r/min、抛光间隙20 μm时，表面粗糙度参数Sa、Sq、PV分别优化为4.778 nm、6.086 nm、9.900 nm。

关键词: 线性液动压抛光, 复合结构, 表面形貌, 液动压力

CLC Number:

TG580.692

YU Hongjiao, WEN Donghui, KONG Fanzhi, FU Yuantao. Linear Hydrodynamic Polishing of Copper Substrates Based on Composite Structure Polishing Tools[J]. China Mechanical Engineering, 2026, 37(3): 546-554.

余虹蛟, 文东辉, 孔凡志, 傅远韬. 基于复合结构抛光工具的铜衬底线性液动压抛光加工[J]. 中国机械工程, 2026, 37(3): 546-554.

Figures/Tables 21

Fig.1 Schematic diagram of linear hydrodynamic polishing

Fig.2 Schematic diagram of inline and spiral structures

Fig.3 Schematic diagram of equidistant and non- equidistant slot width structures

Fig.4 Schematic diagram of single-layer and double-layer structures

Fig.5 Schematic diagram of polishing platform

Fig.6 Physical picture of composite structure polishing tool

Fig.7 Experimental flowchart

Fig.8 Hydraulic pressure cloud map of inline and spiral structure polishing tools

Tab.1 Simulation results of hydraulic pressure for inline and spiral structure polishing tools

	均值 $p$ /Pa	标准差 $σ$ /Pa
直列结构	25 091.65	8402.28
螺旋结构	29 008.68	8602.02

Tab.1 Simulation results of hydraulic pressure for inline and spiral structure polishing tools

	均值 $p$ /Pa	标准差 $σ$ /Pa
直列结构	25 091.65	8402.28
螺旋结构	29 008.68	8602.02

Fig.9 Hydraulic pressure cloud map of equidistant and non-equidistant slot width structure polishing tools

Tab.2 Simulation results of hydraulic pressure for equidistant and non-equidistant slot width structure polishing tools

	均值 $p$ /Pa	标准差 $σ$ /Pa
等距槽宽结构	25 091.65	8402.28
不等距槽宽结构	25 721.78	7837.85

Tab.2 Simulation results of hydraulic pressure for equidistant and non-equidistant slot width structure polishing tools

	均值 $p$ /Pa	标准差 $σ$ /Pa
等距槽宽结构	25 091.65	8402.28
不等距槽宽结构	25 721.78	7837.85

Fig.10 Hydraulic pressure cloud map of single-layer and double-layer structure polishing tools

Tab.3 Simulation results of hydraulic pressure for single-layer and double-layer structure polishing tools

	均值 $p$ /Pa	标准差 $σ$ /Pa
等厚度结构	28 779.23	9410.68
变厚度结构	27 381.78	7660.94

Tab.3 Simulation results of hydraulic pressure for single-layer and double-layer structure polishing tools

	均值 $p$ /Pa	标准差 $σ$ /Pa
等厚度结构	28 779.23	9410.68
变厚度结构	27 381.78	7660.94

Fig.11 Hydraulic pressure cloud map of composite and single structure polishing tools

Tab.4 Simulation results of hydraulic pressure for composite and single structure polishing tools

	均值 $p$ /Pa	标准差 $σ$ /Pa
复合结构	32826.33	7463.33
螺旋结构	29008.68	8602.02
不等距槽宽结构	25721.78	7837.85
变厚度结构	27381.78	7660.941

Tab.4 Simulation results of hydraulic pressure for composite and single structure polishing tools

	均值 $p$ /Pa	标准差 $σ$ /Pa
复合结构	32826.33	7463.33
螺旋结构	29008.68	8602.02
不等距槽宽结构	25721.78	7837.85
变厚度结构	27381.78	7660.941

Fig.12 Results of hydraulic pressure for polishing tools with different structures

Tab.5 Comparison between hydraulic pressure simulation results and test results

抛光工具结构	模拟均值/Pa	测试均值/Pa	均值误差/%
螺旋结构	29 008.68	29 817.62	2.71
直列等距槽宽结构	25 091.65	23 917.68	4.91
不等距槽宽结构	25 721.78	25 600.23	0.47
等厚度结构	28 779.23	27 551.89	4.45
变厚度结构	27 381.78	28 831.27	5.03
复合结构	32 826.33	33 575.64	2.23

Fig.13 The influence of polishing time on surface morphology parameters

Fig.14 The influence of polishing speed on surface morphology parameters

Fig.15 The influence of polishing gap on surface morphology parameters

Fig.16 Surface before and after polishing processing

References 17

[1]	米绪军，娄花芬，解浩峰，等. 我国先进铜基材料发展战略研究［J］. 中国工程科学， 2023， 25（1）： 96-103.
	MI Xujun， LOU Huafen， XIE Haofeng， et al. Development Strategy for Advanced Copper-based Materials in China［J］. Strategic Study of CAE， 2023， 25（1）： 96-103.
[2]	王勇，马玉平，孙方宏，等. 光滑硬质合金衬底渗硼预处理对CVD金刚石薄膜性能的影响［J］. 中国机械工程， 2006， 17（5）： 545-548.
	WANG Yong， MA Yuping， SUN Fanghong， et al. Influence on the Performance of CVD Diamond Films by Boronizing on Smooth Cobalt-cemented Tungsten Carbide［J］. China Mechanical Engineering， 2006， 17（5）： 545-548.
[3]	王宇迪，王鹤峰，杨尚余，等. 纳米压痕技术及其在薄膜/涂层体系中的应用［J］. 表面技术， 2022， 51（6）： 138-159.
	WANG Yudi， WANG Hefeng， YANG Shangyu， et al. Nanoindentation Technique and Its Application in Film/Coating System［J］. Surface Technology， 2022， 51（6）： 138-159.
[4]	RAHMAN M H， MCCARROLL A， SIDDAIAH A， et al. Ultrasonic Assisted Electropolishing to Reduce the Surface Roughness of Laser Powder Bed Fusion Based Additively Manufactured Copper Heat Exchanger Components［J］. The International Journal of Advanced Manufacturing Technology， 2024， 134（9/10）： 4297-4314.
[5]	ZHANG Xinqian， WANG Jinhu， CHEN Jiaqi， et al. Material Removal and Surface Modification of Copper under Ultrasonic-assisted Electrochemical Polishing［J］. Processes， 2024， 12（6）： 1046.
[6]	CHENG Jirui， KANG Renke， DONG Zhigang， et al. A New Polishing Method for Complex Structural Parts： Moist Particle Electrolyte Electrochemical Mechanical Polishing （MPE-ECMP）［J］. Electrochemistry Communications， 2023， 150： 107475.
[7]	SUN Mao， JIANG Liang， WU Yuan， et al. Effect of Potassium Persulfate on Chemical Mechanical Planarization of Cu/Ni Microstructures for MEMS［J］. Microelectronic Engineering， 2023， 275： 111979.
[8]	HASHMI A W， MALI H S， MEENA A， et al. Experimental Investigation on Magnetorheological Finishing Process Parameters［J］. Materials Today： Proceedings， 2022， 48： 1892-1898.
[9]	GHOSH G， SIDPARA A， BANDYOPADHYAY P P. Experimental and Theoretical Investigation into Surface Roughness and Residual Stress in Magnetorheological Finishing of OFHC Copper［J］. Journal of Materials Processing Technology， 2021， 288： 116899.
[10]	淦作昆，蔡姚杰，许鑫祺，等. 线性液动压抛光波纹度加工特性研究［J］. 表面技术， 2022， 51（6）： 336-345.
	GAN Zuokun， CAI Yaojie， XU Xinqi， et al. Processing Characteristics of Linear Hydrodynamic Polishing Waviness［J］. Surface Technology， 2022， 51（6）： 336-345.
[11]	谢重，文东辉，成志超，等. 线性液动压抛光流场的循环交变动压力衍生机制［J］. 中国机械工程， 2023， 34（19）： 2288-2295.
	XIE Zhong， WEN Donghui， CHENG Zhichao， et al. Derivation Mechanism of Cyclic Alternating Dynamic Pressures in Linear Hydrodynamic Polishing Flow Fields［J］. China Mechanical Engineering， 2023， 34（19）： 2288-2295.
[12]	文东辉，许鑫祺，郑子军. 线性液动压抛光流场的剪切特性研究［J］. 中国机械工程， 2021， 32（18）： 2203-2210.
	WEN Donghui， XU Xinqi， ZHENG Zijun. Research on Shear Characteristics of LHP Flow Fields［J］. China Mechanical Engineering， 2021， 32（18）： 2203-2210.
[13]	KADIVAR M， AZARHOUSHANG B. 12-kinematics and Material Removal Mechanisms of Loose Abrasive Machining ［M］∥ Tribology and Fundamentals of Abrasive Machining Processes（3rd ed）. Amsterdam：Elsevier， 2022：507-536.
[14]	付振峰，王振忠，王彪，等. 光学元件超光滑表面的流体动压抛光特性研究［J］. 制造技术与机床， 2022（6）： 11-17.
	FU Zhenfeng， WANG Zhenzhong， WANG Biao， et al. Hydrodynamic Effect Polishing Characteristics of Ultra-smooth Surfaces of Optical Components［J］. Manufacturing Technology & Machine Tool， 2022（6）： 11-17.
[15]	傅远韬. 基于复合结构抛光工具的线性液动压抛光加工表面形貌研究［D］. 杭州：浙江工业大学， 2023.
	FU Yuantao. Research on Surface Morphology in Linear Hydrodynamic Polishing Process by Using Cylindrical Roller with Composite Structures ［D］. Hangzhou： Zhejiang University of Technology， 2023.
[16]	傅远韬，文东辉，孔凡志，等. 线性液动压抛光加工的流场特性研究［J］. 中国机械工程， 2023， 34（11）： 1306-1314.
	FU Yuantao， WEN Donghui， KONG Fanzhi， et al. Research on Characteristics of Flow Fields during LHP Processes［J］. China Mechanical Engineering， 2023， 34（11）： 1306-1314.
[17]	薛凯元. 线性液动压抛光加工流体动压特性研究［D］. 杭州：浙江工业大学， 2019.
	XUE Kaiyuan. Study on the Dynamic Pressure Characteristics of Linear Hydrodynamic Pressure Polishing［D］. Hangzhou： Zhejiang University of Technology， 2019.