Linear Hydrodynamic Polishing of Copper Substrates Based on Composite Structure Polishing Tools
YU Hongjiao, WEN Donghui, KONG Fanzhi, FU Yuantao
China Mechanical Engineering . 2026, (3): 546 -554 .  DOI: 10.3969/j.issn.1004-132X.2026.03.004