关键词: 点对点运动, 轨迹规划, 时间优化, 误差补偿

Abstract:

A novel algorithm of four-order profile planning for point-to-point motion and error compensation method were investigated. The characteristics for the applicability of profile planning algorithm and the requirements for time-optimality of the profile were firstly analyzed. Under the consideration of the profile as a whole, the preprocessing and algorithm with time-optimality for four-order profile planning were presented, based on the system dynamics constraints. Also, an approach of switching time roundness was proposed by reducing system dynamics constraints. This approach compensates effectively accuracy losses in the discrete time implementation. Experimental results show the effectiveness and reliability of proposed methods. Practically, these methods have been successfully applied in semiconductor manufacturing equipment.

Key words: point-to-point motion, profile planning, time-optimization, error compensation