关键词: 压电驱动, 夹持机构, 精密机械, 结构设计, 输出特性

Abstract: In order to simplify the structure of precision piezoelectric clamping mechanisms and reduce the manufacturing difficulty， a micro precision piezoelectric clamping mechanism was proposed based on flexible hinge and two clamping arms， and the working principle was analyzed. The output displacement and force model of the precision piezoelectric clamping mechanisms were established based on the nonlinear strain relation of piezoelectric materials， and the output characteristics of the precision piezoelectric clamping mechanisms were analyzed by numerical simulation. The output performance of the precision piezoelectric clamping mechanisms and the correctness of the theoretical model were verified by the experimental results. The results show that both of the experimental and simulation displacements of the two clamping arms is as hysteretic. The maximum radial displacements of the two clamping arms are as 73.8 μm and 68.6 μm at 120 V driving voltage， respectively. When the driving voltage is greater than 50 V， the output displacement errors of the two clamping arms are within 10% between the experimental values and simulation ones. When the driving voltage is as 120 V， the experimental values of the maximum tangential and axial clamping forces of the clamping mechanisms are as 7.8 N and 5.7 N， respectively. 

Key words:  , piezoelectric driving, clamping mechanism, precision machinery, structural design, output characteristic