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ISSN 1004-132X
CN 42-1294/TH
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中文
An Experimental Investigation of Laser Assisted Waterjet Microgrooving of GaAs Wafers
DUAN Lingyun, HUANG Chuanzhen, LIU Dun, YAO Peng, LIU Hanlian
China Mechanical Engineering . 2023, (
10
): 1172 -1183 . DOI: 10.3969/j.issn.1004-132X.2023.10.006
