Design of High Precision Apertures Driven by a Single Phase Piezoelectric Motor
CAO Teng, LI Xiaoniu, WANG Boquan, WEN Zhiyi, WU Dawei
China Mechanical Engineering . 2022, (20): 2414 -2419 .  DOI: 10.3969/j.issn.1004-132X.2022.20.003