Probe Error Correction Method for Nano-precision On-machine Measurement Systems
GUO Xipeng, XU Wen, WANG Dingwen, LI Rong, YIN Shaohui
China Mechanical Engineering . 2022, (09): 1084 -1089 .  DOI: 10.3969/j.issn.1004-132X.2022.09.010