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ISSN 1004-132X
CN 42-1294/TH
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中文
Wafer Manufacturing Data Anomaly Detection Based on Error Attention
YU Shilong, BAO Jinsong, LI Jie, ZHANG Qihua
China Mechanical Engineering . 2020, (
14
): 1686 -1692 . DOI: 10.3969/j.issn.1004-132X.2020.14.007
