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ISSN 1004-132X
CN 42-1294/TH
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中文
Development of Coating of Photoresist in Semiconductor Manufacturing
XIANG Dong-1, HE Lei-Meng-1, JI De-Gang-1, 2, MAO Feng-1, DUAN An-Hong-1
China Mechanical Engineering . 2012, (
3
): 354 -361 .
