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ISSN 1004-132X
CN 42-1294/TH
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中文
Study on Vibrating EDM of Deep Micro-hole on High Resistance Silicon
CAO Yin-Feng, LIU Zhi-Dong, QIU Meng-Bei, TIAN Zong-Jun, HUANG Yin-Hui
China Mechanical Engineering . 2011, (
7
): 767 -771 .
