Advances in Sphericity Measurement Technology of Micro Sphere#br#

Abstract

Abstract: Firstly, the present sphericity measurement techniques of micro sphere were divided into contact and non-cantact measurement technology according to their principles, and the latter was mainly based on optical image or laser interferometry. Then, the domestic and foreign research progress of sphericity measurement techniques of micro sphere were reviewed and compared, and the main problems of them needed to be solved were listed. In order to overcome the shortages of these techniques, such as low accuracy, lager object size, limit of object material, et al, new developing sphericity measurement techniques of micro sphere were discussed. Finally, the summary and prospect of sphericity measurement technology of micro sphere were given.

Key words: micro sphere, sphericity, 3D measurement, micro-nano measurement

摘要： 根据目前微球球度测量技术的原理，首先将其分为接触式测量和非接触式测量，其中非接触测量主要分为光学图像测量法和激光干涉测量法，就此对国内外微球球度测量技术进行了介绍和比较，并指出各种测量技术需要解决的问题。然后针对这些技术的局限性，如被测尺寸较大、测量精度不高、测量对象材料限制等，探讨了目前正在研究中的新型球度测量方法和技术。最后对微球球度测量方法和技术的研究及开发趋势进行了总结和展望。

关键词: 微球, 球度, 三维测量, 微纳测量

CLC Number:

TH71
TH89

Huang Qiangxian, Hu Xiaojuan, Bian Yakui, Mei Jian, Zhang Liansheng, Chen Lijuan. Advances in Sphericity Measurement Technology of Micro Sphere#br#[J]. China Mechanical Engineering.

黄强先, 胡小娟, 卞亚魁, 梅腱, 张连生, 陈丽娟. 微球球度测量技术的研究进展[J]. 中国机械工程.

References

[1]朱训生，王超. 各种球度测量方法的分析与展望[J]. 机械制造，2003, 41(9): 34-36.

Zhu Xunsheng, Wang Chao. Analysis and Expectation of Sphericity Measuring Methods[J]. Machinery, 2003, 41(9): 34-36.

[2]刘盾，邓乾发，李振，等. 球度测量及其评定方法现状分析[J]. 光学仪器，2010, 32(6): 86-90.

Liu Dun, Deng Qianfa, Li Zhen, et al. Analysis of Current Sphericity Measurement and Its Evaluation Methods[J]. Optical Instruments, 2010, 32(6): 86-90.

[3]蒋庄德，王海容，王朝辉. 纳米测量技术与微型智能仪器[J]. 中国机械工程，2000, 11(3): 248-251.

Jiang Zhuangde, Wang Hairong, Wang Zhaohui. Nanometer Measurement and Micro Intelligent Instrument[J]. China Mechanical Engineering, 2000, 11(3): 248-251.

[4]Masuzawa T, Hamasaki Y, Fujino M. Vibroscanning Method for Nondestructive Measurement of Small Holes[J]. CIRP Annals - Manufacturing Technology, 1993, 45(1): 589-592.

[5]Küng A, Meli F, Thalmann R. Ultra Precision Micro-CMM Using a Low Force 3D Touch Probe[J]. Measurement Science and Technology, 2007, 18(2): 319-327.

[6]Hidaka K, Schellelens P H J. Study of a Small-Sized Ultrasonic Probe[J]. Annals of the CIRP, 2006, 55(1): 567-570.

[7]Michihata M, Takaya Y, Hayashi T. Development of the Nano-Probe System Based on the Laser Trapping Technique[J]. Annals of the CIRP, 2008, 57(1): 493-496.

[8]Claverley J D, Leach R K. Development of a Three-Dimensional Vibrating Tactile Probe for Miniature CMMs[J]. Precision Engineering, 2013, 37(2): 491-499.

[9]Sheu Dong-Yea, Cheng Chung-Chich. Assembling Ball-Ended Styli for CMM's Tactile Probing Heads on Micro EDM[J]. International Journal of Advanced Manufacturing Technology, 2013, 65(1/4): 485-492.

[10]International Organization for Standardization. ISO 3290-1-2008 Rolling Bearings Bearing Parts-hall for Rolling Bearings[S]. Geneva: ISO, 2008.

[11]Küng A, Meli F. Self Calibration Method for 3D Roundness of Spheres Using An Ultraprecision Coordinate Measuring Machine[C]//Proc. of 5th Euspen International Conference. Montpellier: Euspen, 2005: 193-196.

[12]Griesmann U, Soons J, Wang Q, et al. Measuring Form and Radius of Spheres with Interferometry[J]. CIRP Annals-Manufacturing Technology, 2004, 53(1): 451-454.

[13]Michihata M, Hayashi T, Adachi A, et al. Measurement of Probe-stylus Sphere Diameter for Micro-CMM Based on Spectral Fingerprint of Whispering Gallery Modes[J]. CIRP Annals - Manufacturing Technology, 2014, 63(1): 469-472.

[14]Spaan H A M, Widdershoven I, Morel M A A. Novel Calibration Techniques and Applications for Touch Probes with Nanometre Accuracy[C]//Proceedings of the 6th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2006. Vienna, 2006: 390-393.

[15]Hagino T, Yokoyama Y, Kuriyama Y, et al. Sphericity Measurement Using Stitching Interferometry[J]. Key Engineering Materials, 2012,523/524: 883-888.

[16]Bartl G, Krystek M, Nicolaus A, et al. Interferometric Determination of the Topographies of Absolute Sphere Radii Using the Sphere Interferometer of PTB[J]. Meas. Sci. Technol.,2010, 21(11): 115101-115108.

[17]Chen Liang-Chia. Automatic 3D Surface Reconstruction and Sphericity Measurement of Micro Spherical Balls of Miniaturized Coordinate Measuring Probes[J]. Meas. Sci. Technol. ,2007, 18(6): 1748-1755.

[18]Fan Kuang-Chao, Wang Na, Wang Zhiwei, et al. Development of a Roundness Measuring System for Microspheres[J]. Meas. Sci. Technol. ,2014, 25(6): 11260-11276.

[19]王志伟. 纳米三坐标测量机接触式钨丝微测头研制[D]. 合肥：合肥工业大学，2013.

[20]Zhao Jian, Huang Qiangxian, Huang Shuai. The Fabrication and Inspection of a Microball Made of Optical Fibre for Micro-nano Coordinating Measuring Machine[J]. Adv. Mater. Res., 2012, 472/475: 2397-2400.

[21]Yu Huijuan, Huang Qiangxian, Zhao Jian. Fabrication of an Optical Fiber Micro-Sphere with a Diameter of Several Tens of Micrometers[J]. Materials, 2014,7(7): 4878-4895.

[22]Zhao Xuesen, Sun Tao, Yan Yongda, et al. Measurement of Roundness and Sphericity of the Micro Sphere Based on Atomic Force Microscope[J]. Key Engineering Materials, 2006, 315/316: 796-799.

[23]赵学森. 激光靶丸表面几何状态的测量系统及评价方法研究[D]. 哈尔滨：哈尔滨工业大学，2007.

[24]Zhao X S, Geng Y Q, Li W B, et al. Fabrication and Measurement of Nanostructures on the Micro Ball Surface Using A Modified Atomic Force Microscope[J]. Rev. Sci. Instrum. ,2012, 83(11): 115104-115111.

[25]石帅，张林，吴文荣，等.微靶装配中靶球几何量的高精度测量[J]. 强激光与粒子束，2012, 24(8): 1882-1886.

Shi Shuai, Zhang Lin, Wu Wenrong, et al. High-precision Measuring Technique for Geometric Quantities of Microsphere Target in Microtarget Assembly[J]. High Power Laser and Particle Beams, 2012, 24(8): 1882-1886.

[26]宋丽梅. 基于单幅实时测量图像三维形貌恢复的研究[D]. 天津：天津大学，2004.

[27]Song Limei, Wang Danv. Sphericity Error Evaluation Based on 3D Optical Measurement[J].Transactions of the Korean Society of Mechanical Engineers B,2006,30(8):764-771.

[28]Song Limei, Zhou Xinglin, Qu XingHua, et al. Novel 3D Sphericity Evaluation Based on SFS-NDT[J]. NDT and E International, 2005, 38(6): 442-447.

[29]Kanada T.Estimation of Sphericity by Means of Statistical Processing for Roundness of Spherical Parts[J].Precision Engineering, 1997, 20(2): 117-122.

[30]朱训生，任新生，薛秉源. 实用球度测量的经圆法及其实验[J]. 计量技术，1999(3): 6-8.

Zhu Xunsheng, Ren Xinsheng, Xue Bingyuan. Practical Longitud Sphericity Error Measurement and Its Experiments[J]. Measurement Technique, 1999(3): 6-8.

[31]徐烈，谭久彬，张杰. 经线法球度测量的评定方法研究[J]. 哈尔滨工业大学学报，2001, 33(5): 620-624.

Xu Lie, Tan Jiubin, Zhang Jie. Evaluation of Longitud Sphericity Error Measurement[J]. Journal of Harbin Institute of Technology, 2001, 33(5): 620-624.

[32]International Organization for Standardization. ISO 10360-2-2001 CMMs Used for Measuring Size[S]. Geneva: ISO, 2001. [33]赵维谦，谭久彬，杨文国，等.基于两步法超精密圆度仪误差分离系统[J]. 中国机械工程，2000, 11(11): 1206-1209.

Zhao Weiqian, Tan Jiubin, Yang Wenguo, et al. The Error Separation System of Roundness Measuring Instrument Based on the Two-step Method[J]. China Mechanical Engineering, 2000, 11(11): 1206-1209.

[34]Zhao Weiqian, Tan Jiubin, Xue Zi, et al. SEST: A New Error Separation Technique for Ultra-high Precision Roundness Measurement[J]. Meas. Sci. Technol.,2005, 16(3): 833-841.

[35]朱正辉，缪寅宵. 超精密球度的激光干涉测量法[J]. 宇航计测技术, 1999, 19(2): 9-10.

Zhu Zhenghui, Miu Yinxiao. Ultra-precision Sphericity Error Measurement Based on Laser Interferometry[J]. Journal of Astronautic Metrology and Measurement, 1999, 19(2): 9-10.

[36]唐海勇. 基于气动测量的球径球度测量系统研究[D]. 合肥：合肥工业大学, 2007.

[37]刘东月，姜淑华，陈芳涵，等. 玻璃微球球度测试研究[J]. 长春理工大学学报，2008, 31(1): 56-59.

Liu Dongyue，Jiang Shuhua，Chen Fanghan, et al. Research on the Measurement of Sphericityof Micro Glass Bead[J]. Journal of Changchun University of Science and Technology(Natural Science Edition), 2008, 31(1): 56-59.

[38]王健全，田欣利，张保国，等. AFM探针针尖曲率半径显微测量方法[J]. 装甲兵工程学院学报，2012, 26(5): 100-101.

Wang Jianquan，Tian Xinli，Zhang Baoguo，et al. Microscopic Measurement for Radii of Curvature of AFM Probe Tip[J]. Journal of Academy of Armored Force Engineering, 2012, 26(5): 100-101.

[39]邹长玲，董春华，崔金明，等. 回音壁模式光学微腔：基础与应用[J]. 中国科学，2012, 42(11): 1155-1157.

Zou Changling, Dong Chunhua, Cui Jinming, et al. Whispering Gallery Mode Optical Microresonators: Fundamentals and Applications[J]. Sci. Sin. Phys. Mech. Astron., 2012, 42(11): 1155-1175.

[40]黄强先，王毛翠，赵剑，等. 石英音叉扫描探针显微镜[J]. 机械工程学报，2012, 48(4): 1-5.

Huang Qiangxian, Wang Maocui, Zhao Jian, et al. Scanning Probe Microscopy Using Quartz Tuning Fork[J]. Journal of Mechanical Engineering, 2012, 48(4): 1-5.