Research on Novel Parallel Micro-motion Precision Platform with Flexible Hinge

Abstract

Abstract: Based on 3-RPC parallel mechanism, a new 3-PRC parallel micro-motion platform driven by piezoelectric ceramic transducer was put forward and its structure was optimized. The position of the platform was analyzed by using vector method and the theoretical coupling errors of the platform were put out. The motion decoupling characteristics of the platform were researched and analyzed by using the finite element analysis method. At last the prototype was produced and tested. The results show that the parallel micro-platform can achieve three-dimensional movement with high precision and good motion decoupling characteristics in the micron scale.

Key words: 3-PRC, parallel micro-motion platform, decoupling, three-dimensional movement

摘要： 基于3-PRC并联机构提出一种由压电陶瓷驱动的新型3-PRC并联微动平台，并进行了构型优化设计；采用矢量法对该平台的位置进行分析，并给出了该平台的理论耦合性误差；采用有限元对其运动解耦性进行了研究。最后制作了实验样机，并进行了实验测试。研究结果表明，该并联微动平台可以实现微米级三维移动，具有较高的精度和良好的运动解耦特性。

关键词: 3-PRC, 并联微动平台, 解耦, 三维移动

CLC Number:

TP24

Li Shihua, Han Xueyan, Ma Qixiang, Li Fujuan. Research on Novel Parallel Micro-motion Precision Platform with Flexible Hinge[J]. China Mechanical Engineering.

李仕华, 韩雪艳, 马琦翔, 李富娟. 新型并联柔性铰链微动精密平台的研究[J]. 中国机械工程.

References

[1]李杨民，汤晖，徐青松，等.面向生物医学应用的微操作机器人技术发展态势[J].机械工程学报，2011，47(23): 1-13.

Li Yangmin, Tang Hui, Xu Qingsong, et al. Development Status of Micromanipulator Technology for Biomedical Applications[J]. Journal of Mechanical Engineering, 2011, 47(23):1-13.

[2]张旭辉.新型六自由度并联微动机器人的分析、设计与加工[D].秦皇岛：燕山大学，2012.

[3]杨启志，庄佳奇，尹小琴，等.一种三自由度全柔性并联微动激振台的设计[J].机械设计与研究，2011，27(4): 23-27.

Yang Qizhi, Zhuang Jiaqi, Yin Xiaoqin, et al. Study on a Fully Compliant 3-DOF Parallel Micro-displacement Vibration Actuator[J]. Machine Design & Research, 2011, 27(4):23-27.

[4]贾晓辉，田延岭，张大卫，等.基于虚功原理的3-RRPR柔性精密定位工作台的动力学分析[J].机械工程学报，2011，47(1): 68-73.

Jia Xiaohui, Tian Yanling, Zhang Dawei, et al. Inverse Dynamics of 3-RRPR Compliant Precision Positioning Stage Based on the Principle of Virtue Work[J]. Journal of Mechanical Engineering, 2011, 47(1):68-74.

[5]李仕华，句彦儒，王志松，等.一种新构型3-RRRRR并联微动机构的研究[J].中国机械工程，2011，22(22): 2662-2666.

Li Shihua, Ju Yanru, Wang Zhisong, et al. Research on a Kind of New Structured 3-RRRRR Parallel Micromanipulator[J]. China Mechanical Engineering, 2011，22(22): 2662-2666.

[6]Vahid H, Tegoeh T. Dynamic Modeling of 3-DOF Pyramidal-shaped Piezo-driven Mechanism[J]. Mechanism and Machine Theory, 2013,70: 225-245.

[7]许佩霞.3-PRC并联机构运动学分析[J].机械设计，2009,1(26): 14-16.

Xu Peixia. Kinematics Analysis of 3-PRC Parallel Mechanism[J]. Journal of Machine Design, 2009, 26(1):14-16.

[8]叶果，李威，王禹桥，等.柔性桥式微位移机构位移放大比特性研究[J].机器人，2011，33(1): 252-254.

Ye Guo, Li Wei, Wang Yuqiao, et al. Analysis on Displacement Amplification Ratio of a Flexible Bridge-type Micro-displacement Mechanism[J]. Jiqiren/Robot, 2011, 33(2):251-256.

[9]Xu Q S, Li Y M. Analytical Modeling, Optimization and Testing of a Compound Bridge-type Compliant Displacement Amplifier[J]. Mechanism and Machine Theory, 2011(46): 183-200.

[10]毕树生，宗光华.Delta并联微操作手运动学的矢量法分析[J].北京航空航天大学学报，2003，29(4): 339-341.

Bi Shusheng, Zong Guanghua. Analysis of Kinematics of Delta Parallel Micromanipulator with Vector Space Method[J]. Journal of Beijing University of Aeronautics & Astronautics, 2003, 29(4):339-341.

[11]Li Yangmin，Xu Qingsong. Design and Optimization of an XYZ Parallel Micromanipulator with Flexure Hinges[J]. J. Intell. Robot Syst.， 2009， (55): 377-402.

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