Abstract:

In order to develop high precision, large travel, heavy thrust linear piezoelectric motor, a marching type linear piezoelectric motor was proposed based on the piezoelectric stack. The operating principles of the motor were presented, the structure of the motor was designed, a prototype was made and the experimental study was proceeded. The experimental results show that within a certain range of frequency the amplitude of the motor's stator driving foot is linear to the driving voltage, and the maximum amplitude is as 2.9μm. The maximum non-load velocity of the motor is as 796μm/s, the maximum thrust force of the motor is as 4.8N. The expected design objectives are obtained successfully.

Key words: linear piezoelectric motor, piezoelectric stack, double-foot driving, non-resonant vibration, low frequency

摘要：

为研制高精度、大行程、大推力的压电直线电机，设计了一种基于叠层压电陶瓷的步进式压电直线电机。分析了电机的工作原理,对电机的结构进行了设计,制作了原理样机,并进行了实验研究。实验表明,在一定频率范围内,定子驱动足振幅与电压成线性关系,且最大振幅可达2.9μm,电机最大无负载速度为796μm/s,最大输出推力为4.8N,达到了预期的目的。

关键词: 压电直线电机, 叠层压电陶瓷, 双足驱动, 非共振, 低频