Theoretical Analysis and Experimental Research of Grating Mechanical Depicts Process

Abstract

Abstract:

At present, the “test score” processing of grating process model has the characteristics of time-consuming and low efficiency, and grating trough of mechanical characterization can't be precontrolled accurately. The microstructure and mechanical properties of grating score aluminum film were characterized herein through nano-indentation experiments. Formation of trough were studied by using finite element analysis software Deform combined with orthogonal tests. Trough base angle process model was established through study of the range data analysis and the effects of single factor experimental analysis of the data. The results show that, the process can be converted into grating wedge press process, based on the finite element simulation of tank base angle process model is available simultaneously.

Key words: diffraction grating, finite element, orthogonal test, model, process, experiment

摘要：

目前，“试刻划”加工光栅的工艺模式耗时长、效率低，且机械刻划光栅的槽形无法准确预控。通过纳米压痕实验对光栅刻划铝薄膜的微观结构及力学性能进行了表征，采用DEFORM有限元分析软件并结合正交试验对成槽过程进行了研究，通过对数据进行极差分析和单因素影响规律实验分析，建立了槽底角数学工艺模型。研究结果表明，光栅刻划过程可转化为楔体下压过程，基于有限元模拟实验的槽底角数学工艺模型可用。

关键词: 衍射光栅, 有限元, 正交试验, 模型, 工艺, 实验

CLC Number:

TH164

Zhang Baoqing, Shi Guoquan, Shi Guangfeng, Cai Hongbin. Theoretical Analysis and Experimental Research of Grating Mechanical Depicts Process[J]. China Mechanical Engineering, 2014, 25(1): 1-6.

张宝庆, 史国权, 石广丰, 蔡洪彬. 衍射光栅机械刻划工艺理论分析与实验研究[J]. 中国机械工程, 2014, 25(1): 1-6.

References

[1]王芳，齐向东. 高精度控制光电光栅刻划机的光栅外差干涉仪[J]. 激光技术，2008，32(5)：474-476.
Wang Fang，Qi Xiangdong. Grating Heterodyne Interferometer of High Accuracy Controlling Photoelectric Grating Ruling Engine[J]. Laser Technology，2008，32(5)：474-476.
[2]巴音贺希格，高键翔，齐向东，等．10.6μm激光器一级输出高衍射效率闪耀光栅的研制[J]．光电子激光，2004，15(10)：1137-1140．
Bayanheshig，Gao Jianxiang，Qi Xiangdong，et al. 10.6 μm Development of Laser Level Output High Diffraction Efficiency of Gratings[J]. Photoelectron Laser，2004，15(10)：1137-1140．
[3]时轮，郝德阜，齐向东．高精度衍射光栅刻划机的最新技术进展[J]．仪器仪表学报，2001，22(4)：438-439．
Shi Lun，Hao Defu，Qi Xiangdong. The Latest Progress in Technology of High Precision Diffraction Grating Ruling Engine[J]. Chinese Journal of Scientific Instrument，2001，22(4)：438-439．
[4]李英海，巴音贺希格，齐向东. 用于衍射光栅刻划的超精密金刚石刻刀的研制[J]. 微细加工技术，2006，12(6)：15-17.
Li Yinghai，Bayanheshig，Qi Xiangdong. Development of Ultra Precision Diamond Graver for Diffraction Grating[J]. Micro Machining Technology，2006，12(6)：15-17.
[5]李英海. 超精密金刚石刀具-衍射光栅刻划刀[J]. 光学精密工程，1996，4(3)：81-84.
Li Yinghai. Ultra Precision Diamond Cutting Tool-diffraction Grating Knife[J]. Optics and Precision Engineering，1996，4(3)：81-84.
[6]沈彬，孙方宏，薛宏国，等. 高性能复杂形状金刚石薄膜涂层刀具的制备和切削性能研究[J]. 中国机械工程，2008，19(19)：2287-2291.
Shen Bin，Sun Fanghong，Xue Hongguo，et al. High Performance Complex Shape of Diamond Film Coated Tools Preparation and Study on the Cutting Performance[J]. China Mechanical Engineering，2008，19(19)：2287-2291.
[7]马德军,徐可为,何家文. 利用纳米压人加载曲线确定金属薄膜的屈服强度和硬化指数.ⅠⅡ 实验及验证[J]. 金属学报，1999，35(10)：1049-1052.
Ma Dejun，Xun Kewei，He Jiawen. Using Nano Indentation Loading Curve to Determine the Yield Strength and Hardening Exponent of Thin Metal Films. ⅠⅡTest and Verification[J]. The Journal of Metallography，1999，35(10)：1049-1052.
[8]马德军，刘建敏. 材料杨氏模量的纳米压入识别[J]. 中国科学E辑：工程科学和材料科学，2004，34(5)：493-509.
Ma Dejun，Liu Jianmin. Young’s Modulus of Nano Indentation Recognition[J]. Science in China Series E：Engineering Science and Materials Science，2004，34(5)：493-509.
[9]Dao M，Chollacoop N，Van Vliet K J，et al. Computational Modeling of the Forward and Reverse Problems in Instrumented Sharp Indentation[J]. Acta Mater，2001，49(19)：3899-3918.
[10]Oliver W C，Pharr G M. An Improved Technique for Determining Hardness and Elastic Modulus Using Load and Displacement Sensing Indentation Experiments[J]. J. Mater. Res.，1992，7(6)：1564-1583.
[11]胡建军，李小平. DEFORM-3D塑性成形CAE应用教程[M]. 北京：北京大学出版社，2011.
[12]张莉，李升军. DEFORM在金属塑性成形中的应用[M]. 北京：机械工业出版社，2009.
[13]栾军．现代试验设计优化方法[M]. 上海：上海交通大学出版社，1995．
[14]张宝庆，史国权，石广丰,等. 衍射光栅机械刻划成槽的预控试验[J]. 光学精密工程, 2013,21(7):1666-1675.
Zhang Baoqing, Shi Guoquan, Shi Guangfeng,et al. Pre-control of Mechanical Scratching Diffractive Grating[J]. Optics and Precision Engineering,2013,21(7):1666-1675.

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[2]	TAO Yun-Ping, WANG Zhi-Yuan. Energy Dissipation of Bolt Joint under Cycle Load and Parameter Identification of Interfaces  [J]. J4, 201016, 21(16): 1941-1943,1951.
[3]	HU Chao, LIU Zuo-Min. Research on Rolling Bearing’s Heathcote’s Stick-slip Model Based on Materials Compatibility [J]. J4, 201016, 21(16): 1969-1973.
[4]	XU Zheng-E, XU Hong-Jun, FU Yu-Can. Experimental Investigation on High Frequency Induction Brazing of Diamond with Ni-based Brazing Filler [J]. J4, 201016, 21(16): 1977-1981.
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