Abstract:

An experimental device of water jet-assisted laser etching was designed,laser etching technology was combined with a medium-jet erosion processing,and the influences of laser processing parameters and jet processing parameters on the etching capacity and cross section quality of material sample were studied.The results show that the laser processing parameters and jet processing parameters have a decisive impact on the quality of the workpiece,the compound processing technology can remove above 90% melting slags which are produced by the laser processing,and the surface roughness are reduced effectively.The blind holes of  the machined materials have a regular inverted triangle shape.

Key words: laser processing, jet machining, combined machining, laser etching

摘要：

设计了一套用于实验的水射流辅助激光刻蚀加工装置,将激光和介质射流冲蚀加工相结合,研究激光加工参数和射流加工参数对试样材料激光复合刻蚀量和截面质量的影响。实验结果表明,激光工艺参数和射流加工参数对工件加工表面的质量优劣有着决定性的影响;该复合加工工艺可以清除加工时产生的90%以上熔渣,能有效地降低材料表面粗糙度,使得加工出的盲孔成为较为规则的倒三角形。

关键词: 激光加工, 射流加工, 复合加工, 激光刻蚀