Abstract:

A micro operating system which consisted of three degrees of freedom nano platform and microscopic vision was constructed, meanwhile, local calibration was made for visual space and nano platform using the movement error of characteristic objects in visual space on nano platform. Then, optimization equation was constructed and global calibration between the space of vision and the space of nano platform was carried out. When the coefficient matrix of Kalman filter equation was replaced by calibrated transformation matrix and the movements of characteristic points were controlled by the Kalman filter, the positioning precision can be improved. Besides, positioning the lead wires by high pressure airflow can overcome the problem of positioning wires because of the very soft of lead wires. The experimental results show that after the global calibration of system is done, the positioning accuracy achieves 27μm when the movements of characteristic points are controlled by vision based on position, and the precision achieves 5.4μm when the movements of characteristic points are controlled by Kalman filter. Meanwhile, the lead wires can be positioned under electrode of ERW(electric resisting welding) using the airflow positioning.

Key words: micro- motor, lead wire welding, error calibration based on vision, Kalman filter, airflow positioning

摘要：

构建由三自由度纳米平台和显微视觉系统组成的微操作系统,利用纳米平台的特征在视觉空间的运动误差对视觉空间和纳米平台进行局部标定,在此基础上构造优化方程,对视觉空间和图像空间进行全局标定。利用标定的转换矩阵替换卡尔曼滤波器方程中的系数矩阵,用修改后的卡尔曼滤波器控制特征运动,以提高系统的定位精度。利用高压气流定位引线,解决了引线因柔性而定位困难的问题。实验结果表明,系统全局标定后,利用基于位置的视觉控制方法控制特征运动,其定位精度可达27μm,利用卡尔曼滤波器控制特征运动,精度可达5.4μm。气流定位方法可以将引线定位在电阻焊的电极下方。

关键词: 微电机, 引线焊接, 视觉误差标定, 卡尔曼滤波器, 气流定位