Considering the measurement with requirements of high precision and stability for large area diamond film substrate temperature, the necessity of multi-branch measuring data fusion was analyzed. Different data fusion methods were utilized to carry out the data fusion research of sampled substrate temperature data. The robustness of data fusion method was analyzed in details. The research results demonstrate that multi-branch substrate temperature data fusion for large area diamond film can reflect the actual substrate temperature more truly, and the fusion results are with high precision; when temperature measurement is affected by non-normal disturbances or even by sensors’ breakdown, the data fusion results can still be with high precision, and the performance of rejecting disturbance and sensors’ breakdown is improved significantly.

针对大面积金刚石膜衬底温度测量要求精度高、稳定性好的特点，分析了大面积金刚石膜衬底温度多支路测量数据融合的必要性，采用不同数据融合方法对衬底温度采样数据进行数据融合研究。在此基础上，对融合方法的稳健性进行了详细分析。研究结果表明：大面积金刚石膜多路衬底温度数据融合不仅能更真实地反映衬底的实际温度，融合结果精度高，且在多路温度测量受到非正常扰动甚或出现传感器测量故障时，融合结果仍能具有高精度，温度测量的抗扰动和传感器抗故障性能大为提高。

大面积金刚石膜, 衬底温度, 数据融合, 稳健性