微纳系统微区感应加热技术的研究进展
吴德志, 陈卓, 海振银, 陈亮, 叶坤, 王凌云, 赵立波
Research Progresses of Micro-area Induction Heating Technology in Micro/Nano Systems
WU Dezhi, CHEN Zhuo, HAI Zhenyin, CHEN Liang, YE Kun, WANG Lingyun, ZHAO Libo
中国机械工程 . 2022, (01): 2 -14,23 .  DOI: 10.3969/j.issn.1004-132X.2022.01.001