微纳系统微区感应加热技术的研究进展

doi:10.3969/j.issn.1004-132X.2022.01.001

摘要/Abstract

摘要： 微区感应加热作为一种局部加热技术，兼具热响应快、非接触及加热特性可控等优势，在微机电系统、微流控芯片等微纳系统领域的应用潜力巨大。介绍了微区感应加热的基本原理，系统阐述了微区感应加热在封装、驱动及材料生长等方向的研究进展，分析了待解决的关键问题，总结并指出了发展方向。

关键词: 感应加热, 局部加热, 微系统, 封装

Abstract: Micro-area induction heating(MIH), as a localized heating technique with characteristics of non-contact, controllable, and fast thermal-response, was shown numerous potentials in microsystems, such as microelectromechanical systems and microfluidic chips. The fundamentals of MIH were introduced herein, and the research progresses of MIH in the fields of packaging, driving, material growth, et al， was presented systematically. Furthermore, some existing technique problems needed to be solved were analyzed, and several prospective research directions of MIH were pointed out.

Key words: induction heating, localized heating, microsystem, packaging

中图分类号:

TH165

吴德志, 陈卓, 海振银, 陈亮, 叶坤, 王凌云, 赵立波. 微纳系统微区感应加热技术的研究进展[J]. 中国机械工程, 2022, 33(01): 2-14，23.

WU Dezhi, CHEN Zhuo, HAI Zhenyin, CHEN Liang, YE Kun, WANG Lingyun, ZHAO Libo. Research Progresses of Micro-area Induction Heating Technology in Micro/Nano Systems[J]. China Mechanical Engineering, 2022, 33(01): 2-14，23.

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