J4 ›› 2008, Vol. 19 ›› Issue (10): 0-1139.

• 信息技术 •    

非球面检测路径与高精度曲线拟合算法研究

郭隐彪;郭江;王振忠   

  • 收稿日期:1900-01-01 修回日期:1900-01-01 出版日期:2008-05-25 发布日期:2008-05-25

Guo Yinbiao;Guo Jiang;Wang Zhenzhong   

  • Received:1900-01-01 Revised:1900-01-01 Online:2008-05-25 Published:2008-05-25

摘要:

为适应轴对称非球面光学元件面形检测的要求,建立了三种不同的检测路径,并对三种路径进行了评价和对比,阐明其优缺点及适用情况,进而建立了一种高精度数据处理系统。采用Gauss-Newton算法进行非线性最小二乘曲线拟合,分别以单调型和超二次型非球面方程为数学模型验证了该曲线拟合算法的精确性。试验结果表明:该算法的拟合误差在1nm数量级,可用于完成高精度的数据曲线拟合。

关键词: 非球面;数据处理;曲线拟合;最小二乘法

Abstract:

In accordance with the requirements of axisymmetric aspheric measuring,three paths were put forward and estimated.The applicant situations of these three paths were analyzed.A data processing system with high precision was carried out.The Gauss-Newton method was adopted as the curve fitting algorithm for the axisymmetric aspheric surface.The monotonous and super-quadric equations of axisymmetric aspheric lenses were taken as the polynomial mathematics model to verify the accuracy of the nonlinear least square fitting method respectively.The experimental results indicate
that the fitting residual errors are in the 1nm magnitude order,so the curve fitting algorithm can be used in the high-precision curve fitting exactly.

Key words: aspheric;data processing;curve fitting;least square method

中图分类号: