光刻机投影物镜的温度控制算法

J4 ›› 2008, Vol. 19 ›› Issue (10): 0-1139.

• 机械科学 •

光刻机投影物镜的温度控制算法

聂宏飞1;李小平1;张玲莉2

收稿日期:1900-01-01 修回日期:1900-01-01 出版日期:2008-05-25 发布日期:2008-05-25

Temperature Control Algorithm for Optical Lithography Projection Lens

Nie Hongfei1;Li Xiaoping1;Zhang Lingli2

Received:1900-01-01 Revised:1900-01-01 Online:2008-05-25 Published:2008-05-25

摘要/Abstract

摘要：

针对光刻机媒质远传温控系统的大惯性、多重时滞和多重扰动特征，提出了双输入双输出多模态非线性PI控制算法来提高温控过程的收敛速度和稳态精度。算法将温控系统从启动到稳定划分为5个控制模态，下层采用非线性PI算法实现精确控制，上层利用智能决策实现多模态的选择和切换。该算法已被成功运用于光刻机投影物镜温度控制系统中，实现了投影物镜温度控制的快速收敛，使光刻机在±0.006℃范围内稳定工作，对比实验进一步显示该算法具有较强的鲁棒性和自适应性。

关键词: 温度控制；PI算法；多模态；智能决策；双输入双输出

Abstract:

A two-input two-output nonlinear PI algorithm was presented to improve the convergent speed and steady-state accuracy of the temperature control system for projection lens,which had the characteristics of big inertia,multi-time-delay and multi-perturbation.Control process was divided into five phases from start to stability according to the ideal dynamic response curve.Improved PI algorithm was applied to precise by adjust and intelligent decision realizes choice and switch of the multi-model.This
algorithm is used in the temperature control system of projection lens of optical lithography and has achieved quick convergent speed and ±0.006℃ temperature stability.The contrast experimental results show that the algorithm has strong robust and self-adaptive.

Key words: temperature control;PI algorithm;multi-mode;intelligent decision;two-input two-output

中图分类号:

TP273

聂宏飞;李小平;张玲莉;. 光刻机投影物镜的温度控制算法[J]. J4, 2008, 19(10): 0-1139.

Nie Hongfei;Li Xiaoping;Zhang Lingli. Temperature Control Algorithm for Optical Lithography Projection Lens[J]. J4, 2008, 19(10): 0-1139.

[1]	管贤平;戴先中;. 自动导引车系统避免死锁的多属性任务调度方法[J]. J4, 2009, 20(19): 0-2392.
[2]	王晶;;李铁克;张文学;. 基于组合变邻域的无等待流水车间调度研究[J]. J4, 2009, 20(16): 0-1895.
[3]	江小霞;. 地震模拟平台液压系统同步控制的研究[J]. J4, 2009, 20(15): 0-1889.
[4]	曹勇;;李华德;. 机床直线进给伺服的FSMC型迭代学习控制研究[J]. J4, 2009, 20(14): 0-1703.
[5]	王岩;付永领;牛建军;. 变量泵－变量马达自适应控制算法研究[J]. J4, 2009, 20(10): 0-1154.
[6]	訾斌;朱真才;魏明生;. 交流伺服驱动系统动态建模及控制[J]. J4, 2009, 20(08): 0-1007.
[7]	王克义;张立勋;刘攀;张今瑜;. 绳索牵引骨盆康复机器人的轨迹规划[J]. J4, 2009, 20(03): 0-377.
[8]	王强;刘贵杰;王宛山;. 基于小波包能量系数法的砂轮状态监测[J]. J4, 2009, 20(03): 0-266.
[9]	周玉清;梅雪松;姜歌东;孙挪刚;陶涛;. 大型数控机床进给轴润滑状态的快速识别[J]. J4, 2009, 20(02): 0-130.
[10]	张瑞;吴澄;. 求解Job Shop问题的一种免疫模拟退火算法[J]. J4, 2008, 19(23): 0-2897.
[11]	徐生;;鲍官军;张立彬;杨庆华;. 气动柔性五自由度手指的神经网络控制[J]. J4, 2008, 19(23): 0-2897.
[12]	张辉;艾长胜;赵方;昃向博;. 塑窗型材锯铣加工中心数控系统开发[J]. J4, 2008, 19(16): 0-1897.
[13]	孙林;杨世元;吴德会;;. 基于隶属度模糊最小二乘支持向量机的工序能力预测[J]. J4, 2008, 19(13): 0-1637.
[14]	阚;超;孔祥东;高英杰. 液压压力控制系统参数求解及系统仿真分析[J]. J4, 2007, 18(23): 0-2859.

光刻机投影物镜的温度控制算法

Temperature Control Algorithm for Optical Lithography Projection Lens

PDF

可视化

摘要/Abstract

引用本文

使用本文

参考文献

相关文章 14

编辑推荐

Metrics