关键词: 谐振式加速度传感器;有限元;谐振频率;敏感元件

Abstract:

A resonant accelerometer was designed in order to overcome the low output precision characteristics of the sensors which were tested with analog signals. This accelerator has the advantages of good repeatability, high resolution and excellent stability. Relationship between the linear acceleration and the resonant frequency of the sensing unit was deduced and the finite element method was used to simulate the correctness of the theory. The theoretical result and simulation result are 722.2Hz and 720.87Hz respectively without acceleration is applied on this sensor. When 1g acceleration is applied on this sensor, the theoretical and simulation results are 727.3Hz and 726.28Hz and the relative errors are 0.18% and 0.14% respectively. Finally, the fabricated sensor was tested. The measured first order resonant frequency is 718.2Hz, which is very close to the theoretical and simulation result. The results indicate that this design is feasible. 

Key words: resonant accelerator, finite element method, resonant frequency, sensing unit