关键词: 超精密加工；纳米胶体射流加工；抛光；纳米颗粒

Abstract:

Studied the micro structure of work surface atoms, the high surface energy and intense adsorption of SiO2 nanoparticle.For producing ultra-precision surface, a nanoparticle colloid jet machining system was designed and manufactured where the reversible polymerize and decompose reaction was utilized to remove surface atoms. We employed the system to polish a K9 glass sample, some recent experiments prove that it is possible to fabricate ultra-precision in nanoparticle colloid jet machining. The microroughness of the work surface processed by nanoparticle colloid jet machining is under 1nm Ra.

Key words: ultra-precision machining, nanoparticle colloid jet machining, polishing, nanoparticle colloid