中国机械工程

• 先进材料加工工程 • 上一篇    下一篇

注塑模具型腔表面阵列微结构的蚀刻技术

黄红光1;郭钟宁2;杨权1   

  1. 1.广州汽车集团股份有限公司,广州,511434
    2.广东工业大学,广州, 510006
  • 出版日期:2016-09-10 发布日期:2016-09-18
  • 基金资助:
    国家自然科学基金资助项目(U1134003)

Etching Micromachining of Micro-structure Arrays on Injection Mold Cavity Surface

Huang Hongguang1;Guo Zhongning2;Yang Quan1   

  1. 1.Guangzhou Automoible Group Co.,Ltd.,Guangzhou,511434
    2.Guangdong University of Technology,Guangzhou,510006
  • Online:2016-09-10 Published:2016-09-18
  • Supported by:

摘要: 设计了一种简单的掩模,并通过控制蚀刻液的喷淋压力进行了平滑阵列微结构研究。研究发现,蚀刻液喷淋压力对微结构的加工形貌有显著影响,蚀刻深度和侧蚀量随蚀刻液喷淋压力增大而增大。研究整合了多次加工和控制喷淋压力的工艺,得到了理想的无棱边棱角、结构均匀的深度渐变型阵列微凸结构。最终在注塑模具表面上加工出宽度为200μm、深度约60μm的无棱边棱角、过渡平滑的阵列微结构。

关键词: 化学蚀刻, 表面微阵列结构, 蚀刻深度, 侧蚀量, 二次加工

Abstract: A simple mask was designed,and smooth rally micro-structure was researched.It is found that spray pressure is of significant influences on the micro-structure feature,the etching depth and undercut will increase per unit time when spay pressure is growing.Different processing method with controlled spay pressure was integrated to machine rally micro-structure,such as smooth rally micro salient and gradual depth rally micro-structure. Finally,a large rally smooth micro-structure with diameter of 200μm, depth of 60μm was machined.

Key words: chemical etching, rally surface micro-structure, etching depth, undercut, secondary etching

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