一种Intrabay物料运输系统的多目标实时调度方法

摘要/Abstract

摘要：

为了提高晶圆制造Intrabay物料运输系统（简称Intrabay系统）的多目标调度性能，提出了一种基于模糊逻辑-匈牙利方法的Intrabay系统多目标实时调度方法。该方法实时响应运输小车空载和晶圆卡请求运输等动态事件，并对各事件时刻的Intrabay系统调度子问题进行多目标优化求解。采用300mm的晶圆制造系统数据进行仿真实验并与传统的Intrabay系统调度方法进行比较,结果表明该方法在Intrabay系统和晶圆加工系统的多个指标综合性能方面优于传统Intrabay系统调度方法，验证了Intrabay系统多目标实时调度方法的有效性。
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关键词: 晶圆制造, Intrabay物料运输系统, 调度, 多目标, 实时

Abstract:

To obtain better multi-objective comprehensive performances of the Intrabay material handling systems in semiconductor wafer fabrication systems(SWFSs),a fuzzy logic and Hungarian algorithm based dispatching approach was proposed.The approach responsed the system's dynamic events such as vehicle idling and wafer lot requiring for handling in real-time, and then solved scheduling sub-problems of Intrabay material handling system in the moments corresponding to these dynamic events. With experimental data from an Intrabay material handling system of 300mm SWFSs, it is demonstrated that the proposed approach has better multi-objective comprehensive performances than both the traditional first encounter first served(FEFS) rule and the highest priority(HP) first served rule based dispatching approaches for Intrabay material handling systems. 

Key words: wafer fabrication, Intrabay material handling system, dispatch, multi-objective, real-time

中图分类号:

TH166

吴立辉1, 朱登洁1, 张洁2. 一种Intrabay物料运输系统的多目标实时调度方法[J]. 中国机械工程, 2013, 24(6): 769-774.

TUN Li-Hui-1, SHU De-Ji-1, ZHANG Ji-2. A Multi-objective Real-time Dispatching Approach for Intrabay Material Handling Systems[J]. China Mechanical Engineering, 2013, 24(6): 769-774.

参考文献

[1]Lin D P,Lee K M. A Review of the Research Meth-odology for the Re- entrant Scheduling Problem [J]. International Journal of Production Research, 2011,49(8) :2221-2242.
[2]Govind N,Roeder T,Schruben L W. A Simulation-- based Closed Queuing Network Approximation of Semiconductor Automated Material Handling Sys- tems [J]. IEEE Transactions on Semiconductor Manufacturing, 2011,24 (1) :5-13.
[3]Agrawal G K, Heragu S S. A Survey of Automated Material Handling Systems in 300mm Semiconduc- tor Fabs[J]. IEEE Transactions on Semiconductor Manufacturing, 2006, 19 ( 1 ) : 112-120.
[4]Lin J T,Wang F K, Yen P Y. Simulation Analysis of Dispatching Rules for An Automated Interbay Ma- terial Handling System in Wafer Fab[J]. Interna- tional Journal of Production Research, 2001,39 ( 6 ) : 1221-1238.
[5]Hasenbein J ,Sigireddy S,Wright R. Taking a Queue from Simulation: The Many Rules of Scheduling Semiconductor Material Handling[J]. IEEE Trans- actions, 2004,36 (8) : 39-43.
[6]Liu C Y, Liao D Y. An Optimal OHT Dispatching System for 300mm Semiconductor Manufacturing [C]//IEEE International Conference on Systems, Man and Cybernetics. Piscataway: IEEE Press, 2004: 1631-1636.
[7]Liao D Y,Jeng M D,Zhou M C. Application of Petri Nets and Lagrangian Relaxation to Scheduling Au- tomatic Material- handling Vehicles in 300mm Semiconductor Manufacturing [J]. IEEE Transac- tions on Systems, Man and Cybernetics- Part C: Applications and Reviews, 2007,37 (4) : 504-516.
[8]Liao D Y, Wang C N. Differentiated Pre-- emptive Dispatching for Automatic Materials Handling Serv- ices in 300mm Semiconductor Foundry[J]. Interna- tional Journal of Advanced Manufacturing Technol- ogy,2006,29(9/10) :890-896.
[9]Wang C N. The Heuristic Dispatching Method of Automatic Material Handling System in 300mm Semiconductor Fabrication[J]. International Journal of Innovative Computer Information and Control, 2009,5 (7) : 1927-1935.
[10]Lin J T,Wang F K,Chang Y M. A Hybrid Push/ Pull Dispatching Rule for a Photo- bay in a 300mm Wafer Fab[J]. Robotics and Computer In- tegrated Manufacturing, 2006,2 (1) : 47-55.
[11]Le-- anh T, De-- Koster M. On-- line Dispatching Rules for Vehicle--based Internal Transport Sys- tems[J]. International Journal of Production Re- search, 2005,43(8) :1711-1728.
[12]Myers R H, Montgomery D C. Response Surface Methodology:Process and Production Optimization Using Designed Experiments (Wiley Series in Probability and Statistics) [M]. New York: Wiley Inter-- Science Publications, 2009.
[13]Vinodh S,Balaji S R. Fuzzy Logic Based Leanness Assessment and Its Decision Support System[J]. International Journal of Production Research, 2011,49(13) :4027-4041.
[14]Goldberger J,Tassa T. A Hierarchical Clustering Algorithm Based on the Hungarian Method[J]. Pattern Recognition Letters, 2008, 29 ( 11 ) : 1632 - 1638.
[15]Azadegan A,Ghazinoory S,Samouei P. Fuzzy Logic in Manufacturing: A Review of Literature and a Specialized Application[J]. International Journal of Production Economics,2011,132(2) :258-270.
[16]李士勇.模糊控制[M].哈尔滨:哈尔滨工业大学出版社,2011.
[17]Mok P Y,Kwong C K,Wong W K. Optimization of Fault--tolerant Fabric- cutting Schedules Using Genetic Algorithms and Fuzzy Set Theory[J]. Eu- ropean Journal of Operational Research, 2007,177 (26) : 1876-1893.
[18]Wu L H,Mok P Y, Zhang J. An Adaptive Multi-- parameter Based Dispatching Strategy for Single-- loop Interbay Material Handling Systems[J]. Com- puters in Industry, 2011,62 : 175-186.
[19]Li B,Yang C J. Production Logistics System Based on a Hybrid Push/Pull Control Strategy in Make-- to--order Environments[J]. International Journal of Innovative Computing Information and Control, 2009,5 (5): 1343-1350.
[20]Kuo C H,Wang C H,Huang K W. Behavior Mod- eling and Control of 300mm Fab Intrabays Using Distributed Agent Oriented Petri Net[J]. IEEE Transactions on Systems, Man and Cybernetics-- Part A: Systems and Humans, 2003,33 (5) :641- 648.
[21]Wang C N,Liao D Y. Expeditious Hot Lots Han- dling in 300mm Semiconductor Foundry[C]// IEEE International Conference on Systems, Man and Cybernetics. Piscataway: IEEE Press, 2006: 4677-4681.