永磁直线同步电动机, 振动, 有限元法, 超精密机床

PMLSM drives the feed table of an ultra-precision CNC machine tool directly,so the vibration of PMLSM’s mover affects directly the precision of the machine tool.The method of vibration prediction in the design stage was constructed herein.Firstly,FEM was used to analyze the dynamics of the mover, and the transfer function of magnetic force and acceleration were obtained.Secondly, the connection of current and magnetic force was set up. Thirdly, the transient current was got by MATLAB while the PMLSM was running in transient. Then magnetic forces were calculated by interpolation using the relationship of current and magnetic force. Lastly, acceleration was calculated by the transfer function. It is helpful to vibration analysis and design optimization of PMLSM in the future work.

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