Research on Calibration Principle and Method of Laser Tracker Base Stations Based on External Physical Standard

doi:10.3969/j.issn.1004-132X.2025.08.022

Abstract

Abstract:

A kind of external physical standard for laser tracker base station calibration was designed， which was called BSC. Firstly， the principle of BSC of laser tracker was introduced. Then a high-precision CMM was used to measure the repeated positioning accuracy of the BSC， which verified the characteristics of high-precision repeated positioning， verified the feasibility of the calibration principle of the base stations， and might realize the accurate positioning of the target mirror in space. Finally， the BSC was introduced into the CNC machine tool positioning error measurement experiments， and the measurement results were compared with that of the laser interferometer. The research finds that the two measurement principles of the error value change trends are basically the same， the maximum deviation of X axis positioning error measurement is as 1.8 μm， the maximum deviation of Y axis positioning error measurement is as 2.3 μm. The results show that the calibration principle of the BSC is feasible， the accuracy meets the calibration requirements of the laser trackers， and the measurement results are in good agreement with the existing mature equipment. This method puts forward a new idea and method for the calibration of the laser tracker base stations.

Key words: base station calibration（BSC）, physical standard, error measurement, laser tracking, CNC machine tool

摘要：

设计了一种适用于激光跟踪仪基站标定的外部实物标准——基站标定仪。介绍了激光跟踪仪的基站标定原理；采用高精度三坐标测量机对基站标定仪重复定位精度进行测量，验证了其具有高精度重复定位的特点，验证了基站标定原理的可行性，可实现靶镜空间的精确定位；最后引入基站标定仪至数控机床定位误差测量实验，并与激光干涉仪测量结果进行对比，研究发现，两种测量原理误差值变化趋势基本一致，X轴定位误差测量最大偏差为1.8 μm，Y轴定位误差测量最大偏差为2.3 μm。结果表明，基站标定仪的标定原理是可行的，精度满足激光跟踪仪标定要求，测量结果与现有成熟设备一致性好，该方法为激光跟踪仪基站标定提供了一种新的思路。

关键词: 基站标定, 实物标准, 误差测量, 激光跟踪, 数控机床

CLC Number:

TG659

Haitao LI, Shulei XU, Yawen WANG, Xiaobin BAI, Xiaoning JING. Research on Calibration Principle and Method of Laser Tracker Base Stations Based on External Physical Standard[J]. China Mechanical Engineering, 2025, 36(8): 1875-1882.

李海涛, 徐曙磊, 王雅雯, 白晓宾, 荆晓宁. 基于外部实物标准的激光跟踪仪基站标定原理及方法研究[J]. 中国机械工程, 2025, 36(8): 1875-1882.

Figures/Tables 19

Fig.1 Multi-station multi-lateral measurement principle

Fig.2 Working principle of BSC

Fig.3 Structure of target mirror adjusting device

Fig.4 High precision coordination principle of BSC

Fig.5 Position of the target mirror in the BSC

Fig.6 Side view of BSC

Fig.7 Base station calibrator instrument

Fig.8 Schematic diagram of the installation position of the leaf spring and precision ball

Fig.9 Fine-tuning principle of adjustment board

Fig.10 Target mirror position calibration experiment of BSC

Tab.1 Coordinate values of electromagnetic iron position adjustment device A

位置A	均值	最大值	最小值	差值/μm	标准差
X	384.3373	384.3385	384.3363	2.2	0.002 89
Y	334.6227	334.6242	334.6214	1.8	0.002 48
Z	111.3580	111.3593	111.3568	2.5	0.001 63

Tab.2 Coordinate values of electromagnetic iron position adjustment device B

位置B	均值	最大值	最小值	差值/μm	标准差
X	357.8257	357.8266	357.8248	1.7	0.003 69
Y	360.7145	360.7153	360.7137	1.6	0.002 70
Z	111.3398	111.3408	111.3387	2.1	0.001 31

Tab.3 Coordinate values of electromagnetic iron position adjustment device C

位置C	均值	最大值	最小值	差值/μm	标准差
X	332.7063	332.7073	332.7054	1.9	0.002 56
Y	333.5293	333.5304	333.5283	2.1	0.001 61
Z	111.3802	111.3811	111.3792	1.9	0.001 42

Tab.4 Coordinate values of electromagnetic iron position adjustment device D

位置D	均值	最大值	最小值	差值/μm	标准差
X	358.5922	358.5934	358.5911	2.3	0.002 17
Y	307.3835	307.3837	307.3826	2.1	0.002 53
Z	111.3374	111.3384	111.3365	2.2	0.001 34

Fig.11 Error measurement experiment by laser interferometer

Fig.12 Overall layout of measuring device

Fig.13 Machine error measurement using BSC

Tab.5 Positioning errors measured by the laser interferometer

位置/mm		50	100	150	200	250	300
干涉仪测量误差/μm	X轴	2.4	5.6	7.8	6.1	6.7	7.3
干涉仪测量误差/μm	Y轴	4.8	9.7	15.7	13.2	16.2	15.4
基站标定仪测量误差/μm	X轴	3.6	5.1	7.2	5.8	7.9	9.1
基站标定仪测量误差/μm	Y轴	5.3	8.6	16.5	14.6	18.3	17.7
误差差值/μm	X轴	-1.2	0.5	0.6	0.3	-1.2	-1.8
误差差值/μm	Y轴	-0.5	1.1	-0.8	-1.4	-2.1	-2.3

Fig.14 Measurement results comparison based on different measurement principles

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