China Mechanical Engineering ›› 2025, Vol. 36 ›› Issue (8): 1691-1699.DOI: 10.3969/j.issn.1004-132X.2025.08.005
Zhiwei ZHOU1, Jian GAO1,2(), Lanyu ZHANG1,2
Received:
2024-08-30
Online:
2025-08-25
Published:
2025-09-18
Contact:
Jian GAO
通讯作者:
高健
作者简介:
周志伟,男,1987年生,博士研究生。研究方向为微电子装备制造、多轴运动平台控制。发表论文6篇。基金资助:
CLC Number:
Zhiwei ZHOU, Jian GAO, Lanyu ZHANG. A Model-free Cross-coupling Control Method for Parallel Kinematic Mechanisms with Symmetric Structure[J]. China Mechanical Engineering, 2025, 36(8): 1691-1699.
周志伟, 高健, 张揽宇. 对称并联运动机构的无模型交叉耦合控制[J]. 中国机械工程, 2025, 36(8): 1691-1699.
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URL: https://www.cmemo.org.cn/EN/10.3969/j.issn.1004-132X.2025.08.005
RMSE | IAE | ||||||
---|---|---|---|---|---|---|---|
q1 | q2 | q3 | q1 | q2 | q3 | ||
跟踪误差/μm | TDC | 7.49 | 4.91 | 2.41 | 28.21 | 39.25 | 13.35 |
所提方法 | 6.42 | 3.69 | 1.61 | 24.61 | 29.85 | 9.94 | |
减幅/% | 14.3 | 24.8 | 33.2 | 12.8 | 23.9 | 25.5 | |
协同误差/μm | TDC | 9.31 | 5.65 | 8.07 | 62.54 | 45.55 | 37.82 |
所提方法 | 7.57 | 4.21 | 6.13 | 49.16 | 34.54 | 28.46 | |
减幅/% | 18.7 | 25.5 | 23.9 | 21.4 | 24.2 | 24.7 |
Tab. 1 Comparison of tracking error and cooperative error in joint space between the proposed method and TDC
RMSE | IAE | ||||||
---|---|---|---|---|---|---|---|
q1 | q2 | q3 | q1 | q2 | q3 | ||
跟踪误差/μm | TDC | 7.49 | 4.91 | 2.41 | 28.21 | 39.25 | 13.35 |
所提方法 | 6.42 | 3.69 | 1.61 | 24.61 | 29.85 | 9.94 | |
减幅/% | 14.3 | 24.8 | 33.2 | 12.8 | 23.9 | 25.5 | |
协同误差/μm | TDC | 9.31 | 5.65 | 8.07 | 62.54 | 45.55 | 37.82 |
所提方法 | 7.57 | 4.21 | 6.13 | 49.16 | 34.54 | 28.46 | |
减幅/% | 18.7 | 25.5 | 23.9 | 21.4 | 24.2 | 24.7 |
控制方案 | RMSE | IAE | ||||
---|---|---|---|---|---|---|
X/μm | Z/μm | B/μrad | X/μm | Z/μm | B/mrad | |
TDC | 4.91 | 6.98 | 89.61 | 39.25 | 32.75 | 0.61 |
所提方法 | 3.69 | 4.51 | 72.88 | 29.85 | 20.95 | 0.47 |
减幅/% | 24.8 | 35.4 | 18.7 | 23.9 | 36.1 | 21.3 |
Tab.2 Comparison of tracking error in task space between the proposed method and TDC
控制方案 | RMSE | IAE | ||||
---|---|---|---|---|---|---|
X/μm | Z/μm | B/μrad | X/μm | Z/μm | B/mrad | |
TDC | 4.91 | 6.98 | 89.61 | 39.25 | 32.75 | 0.61 |
所提方法 | 3.69 | 4.51 | 72.88 | 29.85 | 20.95 | 0.47 |
减幅/% | 24.8 | 35.4 | 18.7 | 23.9 | 36.1 | 21.3 |
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