中国机械工程 ›› 2025, Vol. 36 ›› Issue (8): 1691-1699.DOI: 10.3969/j.issn.1004-132X.2025.08.005
• 机械基础工程 • 上一篇
收稿日期:
2024-08-30
出版日期:
2025-08-25
发布日期:
2025-09-18
通讯作者:
高健
作者简介:
周志伟,男,1987年生,博士研究生。研究方向为微电子装备制造、多轴运动平台控制。发表论文6篇。基金资助:
Zhiwei ZHOU1, Jian GAO1,2(), Lanyu ZHANG1,2
Received:
2024-08-30
Online:
2025-08-25
Published:
2025-09-18
Contact:
Jian GAO
摘要:
并联机构驱动关节间的动力学耦合效应是影响其轨迹跟踪性能的关键难题,现有并联平台的多电机协同控制方法常常不考虑机构关节间的相互耦合关系及其关节协同关系,影响了机构末端的运动精度。针对上述问题,提出一种提高机构任务空间跟踪精度的无模型交叉耦合控制方法。通过引入表示相邻电机运动关系的电机协同误差,采用时延估计(TDE)技术间接地进行机构动力学闭环控制,解决动力学模型不确性问题;同时采用Lyapunov定理分析证明所提方法的稳定性,并在对称并联运动机构上进行所提方法的实验验证。结果表明,相比现有的时延控制(TDC)方法,所提方法可以通过并联机构的高效位置跟踪和稳定操作有效减小其末端运动跟踪误差。
中图分类号:
周志伟, 高健, 张揽宇. 对称并联运动机构的无模型交叉耦合控制[J]. 中国机械工程, 2025, 36(8): 1691-1699.
Zhiwei ZHOU, Jian GAO, Lanyu ZHANG. A Model-free Cross-coupling Control Method for Parallel Kinematic Mechanisms with Symmetric Structure[J]. China Mechanical Engineering, 2025, 36(8): 1691-1699.
RMSE | IAE | ||||||
---|---|---|---|---|---|---|---|
q1 | q2 | q3 | q1 | q2 | q3 | ||
跟踪误差/μm | TDC | 7.49 | 4.91 | 2.41 | 28.21 | 39.25 | 13.35 |
所提方法 | 6.42 | 3.69 | 1.61 | 24.61 | 29.85 | 9.94 | |
减幅/% | 14.3 | 24.8 | 33.2 | 12.8 | 23.9 | 25.5 | |
协同误差/μm | TDC | 9.31 | 5.65 | 8.07 | 62.54 | 45.55 | 37.82 |
所提方法 | 7.57 | 4.21 | 6.13 | 49.16 | 34.54 | 28.46 | |
减幅/% | 18.7 | 25.5 | 23.9 | 21.4 | 24.2 | 24.7 |
表1 所提方法和TDC在关节空间的跟踪误差、协同误差比较
Tab. 1 Comparison of tracking error and cooperative error in joint space between the proposed method and TDC
RMSE | IAE | ||||||
---|---|---|---|---|---|---|---|
q1 | q2 | q3 | q1 | q2 | q3 | ||
跟踪误差/μm | TDC | 7.49 | 4.91 | 2.41 | 28.21 | 39.25 | 13.35 |
所提方法 | 6.42 | 3.69 | 1.61 | 24.61 | 29.85 | 9.94 | |
减幅/% | 14.3 | 24.8 | 33.2 | 12.8 | 23.9 | 25.5 | |
协同误差/μm | TDC | 9.31 | 5.65 | 8.07 | 62.54 | 45.55 | 37.82 |
所提方法 | 7.57 | 4.21 | 6.13 | 49.16 | 34.54 | 28.46 | |
减幅/% | 18.7 | 25.5 | 23.9 | 21.4 | 24.2 | 24.7 |
控制方案 | RMSE | IAE | ||||
---|---|---|---|---|---|---|
X/μm | Z/μm | B/μrad | X/μm | Z/μm | B/mrad | |
TDC | 4.91 | 6.98 | 89.61 | 39.25 | 32.75 | 0.61 |
所提方法 | 3.69 | 4.51 | 72.88 | 29.85 | 20.95 | 0.47 |
减幅/% | 24.8 | 35.4 | 18.7 | 23.9 | 36.1 | 21.3 |
表2 所提方法和TDC在任务空间的跟踪误差比较
Tab.2 Comparison of tracking error in task space between the proposed method and TDC
控制方案 | RMSE | IAE | ||||
---|---|---|---|---|---|---|
X/μm | Z/μm | B/μrad | X/μm | Z/μm | B/mrad | |
TDC | 4.91 | 6.98 | 89.61 | 39.25 | 32.75 | 0.61 |
所提方法 | 3.69 | 4.51 | 72.88 | 29.85 | 20.95 | 0.47 |
减幅/% | 24.8 | 35.4 | 18.7 | 23.9 | 36.1 | 21.3 |
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