关键词: MEMS, 变截面梁, 最大转角尺寸刚度, 最大挠度尺寸刚度, 数学模型

Abstract:

A variable cross-section beam was used to reduce stress concentration in MEMS structure. A mathematical model of the variable cross-section beam bending could provide reliable theoretical basis to MEMS device processing. As a prerequisite to increase the utilization of space and retain maximum angle and maximum deflection unchanged,the maximum angle dimension stiffness Kφ and the maximum deflection dimension stiffness KW expression were constructed individually. Compared with the dimension stiffness of the original design parameters, the relationship among the dimension stiffness, the beam length and the height of the end face was created clearly, then providing a theoretical support for the design of beam structures in MEMS.

Key words: micro-electro mechanical system(MEMS), variable cross-section beam, maximum angle dimension stiffness, maximum deflection dimension stiffness, mathematical model