中国机械工程 ›› 2026, Vol. 37 ›› Issue (10): 2631-2643.DOI: 10.3969/j.issn.1004-132X.2026.10.026
收稿日期:2026-01-11
出版日期:2026-10-25
发布日期:2026-11-10
通讯作者:
贾卫平
作者简介:吴蒙华,男,1963年生,教授。研究方向为微细电化学加工技术研究与应用。发表论文60余篇基金资助:
WU Menghua1, HUANG Zhiwei1, JIA Weiping2(
)
Received:2026-01-11
Online:2026-10-25
Published:2026-11-10
Contact:
JIA Weiping
摘要:
在无掩模定域性电沉积(LECD)过程中引入激光、射流、超声波、磁场等能场,可以克服传统单一电沉积电场加工技术的局限性,满足某些特定性能需求。介绍了激光、流场、超声场、磁场等能场辅助无掩模LECD技术的作用原理、特点、代表性研究成果及其研究进展。业内学者的研究结果表明,在无掩模LECD金属三维微结构过程中,通过严格控制外加能场的强度、作用方向和时间等,合理利用外加能场与电沉积电场协同耦合产生的复合效应,可以减小电沉积缺陷,获得较高的电沉积效率、较好的表面质量、细晶化微(纳)米组织结构、较好的物理机械性能。深入开展外加能场协同下的金属微结构无掩模LECD技术研究,可精益性解决无掩模LECD-增材制造效率、精度、尺度之间的矛盾,拓展无掩模LECD技术的工艺极限。
中图分类号:
吴蒙华, 黄志维, 贾卫平. 外加能场辅助无掩模定域性电沉积三维金属微结构的研究进展[J]. 中国机械工程, 2026, 37(10): 2631-2643.
WU Menghua, HUANG Zhiwei, JIA Weiping. Research Progress in Maskless Localized Electrochemical Deposition Technology of 3D Metal Microstructures Assisted by External Energy Fields[J]. China Mechanical Engineering, 2026, 37(10): 2631-2643.
| 所制备微结构的特征尺寸 | 精度(表面粗糙度) | 沉积速率(度) | 微观 组织 | 结构 特征 | 主要优缺点 | |
|---|---|---|---|---|---|---|
激光辅助无掩模LECD 技术 | Cu质微米尺度三维微结构最大深宽比8∶1,Cu质微米尺度涂层、图案,Cu质微米尺度阵列,Ni质微米尺度线条、沉积层,Au质微米尺度线条,Ag质微米尺度涂层,Au质微米尺度螺旋弹簧。 | nm级、μm级,线宽变化量7 | 15.47 | 微米晶、纳米(孪)晶 | 简单、复杂三维微结构,准三维图案、涂层,微阵列 | 优点:可提高屈服强度、沉积效率、硬度、弹性模量、阴极电流,微结构表面平整、耐腐蚀性强、成形精度高,具有大规模增材制造的优势。缺点:工艺过程复杂。 |
流场辅助无掩模LECD 技术 | Cu质微米尺度线条与字母,Ni质微米尺度圆柱最大深宽比22∶1,Cu质微米尺度圆柱最大深宽比8∶1,Ni质毫米尺度双弧圆柱最大长径比110∶1,Ni质毫微米尺度U形悬臂、30° | 线宽变化量≈30 μm,尺寸误差≤7 μm,Ra=0.18 | 5600 μm³/s、 16 μg/s、16.6 | Ni微米晶、Cu纳米晶和微米晶 | 准三维结构,简单三维微结构,复杂三维精密微结构 | 优点:定域性电沉积定位精度和沉积速率高,微结构表面光滑、结构致密、孔隙率小、弹性模量大、具有较高的显微硬度和深宽比,可有效减少扩散层平均厚度。缺点:微结构垂直度差、成形精度不高、工艺过程复杂。 |
| 超声辅助无掩模LECD | Ni质微米尺度圆柱最大深宽比8∶1,GO/Cu复合箔厚100 μm,Ni-Co-Fe合金涂层面积50 mm×30 mm、厚60 μm,Gr/Ni-Co复合涂层面积20 mm×20 mm、厚45 μm。 | GO/Cu箔Ra=36 nm。 | 15 340 μm3/s、1.0 | 纳米晶、微米晶 | 简单三维微结构,准三维 结构 | 优点:沉积速率高,微结构具有较高的导热系数和显微硬度、较低的摩擦因数和较小的磨损量与腐蚀速率。缺点:微结构垂直度差、表面粗糙。 |
| 磁场辅助无掩模LECD | Ni质微米尺度圆柱最大深宽比10∶1,Ni质微米尺度微结构深宽比≥7,毫米尺度的Fe、Cu锥形结构,微米尺度的Ni-SiC复合层、 | 成形精度达μm级,Ra=84 nm、面粗糙度Sa=2.94 μm。 | 13 800 μm3/s、 0.67 µm/min | 纳米晶、微米晶 | 简单三维微结构,准三维 结构 | 优点:沉积速率高,微结构具有较高显微硬度和饱和磁化强度、较低的摩擦因数和较小的磨损率与腐蚀电流。缺点:微结构表面粗糙、影响因素多。 |
表1 不同能场辅助无掩模LECD作用效果的对比
Tab.1 Comparison of the effects of different energy field-assisted maskless LECD
| 所制备微结构的特征尺寸 | 精度(表面粗糙度) | 沉积速率(度) | 微观 组织 | 结构 特征 | 主要优缺点 | |
|---|---|---|---|---|---|---|
激光辅助无掩模LECD 技术 | Cu质微米尺度三维微结构最大深宽比8∶1,Cu质微米尺度涂层、图案,Cu质微米尺度阵列,Ni质微米尺度线条、沉积层,Au质微米尺度线条,Ag质微米尺度涂层,Au质微米尺度螺旋弹簧。 | nm级、μm级,线宽变化量7 | 15.47 | 微米晶、纳米(孪)晶 | 简单、复杂三维微结构,准三维图案、涂层,微阵列 | 优点:可提高屈服强度、沉积效率、硬度、弹性模量、阴极电流,微结构表面平整、耐腐蚀性强、成形精度高,具有大规模增材制造的优势。缺点:工艺过程复杂。 |
流场辅助无掩模LECD 技术 | Cu质微米尺度线条与字母,Ni质微米尺度圆柱最大深宽比22∶1,Cu质微米尺度圆柱最大深宽比8∶1,Ni质毫米尺度双弧圆柱最大长径比110∶1,Ni质毫微米尺度U形悬臂、30° | 线宽变化量≈30 μm,尺寸误差≤7 μm,Ra=0.18 | 5600 μm³/s、 16 μg/s、16.6 | Ni微米晶、Cu纳米晶和微米晶 | 准三维结构,简单三维微结构,复杂三维精密微结构 | 优点:定域性电沉积定位精度和沉积速率高,微结构表面光滑、结构致密、孔隙率小、弹性模量大、具有较高的显微硬度和深宽比,可有效减少扩散层平均厚度。缺点:微结构垂直度差、成形精度不高、工艺过程复杂。 |
| 超声辅助无掩模LECD | Ni质微米尺度圆柱最大深宽比8∶1,GO/Cu复合箔厚100 μm,Ni-Co-Fe合金涂层面积50 mm×30 mm、厚60 μm,Gr/Ni-Co复合涂层面积20 mm×20 mm、厚45 μm。 | GO/Cu箔Ra=36 nm。 | 15 340 μm3/s、1.0 | 纳米晶、微米晶 | 简单三维微结构,准三维 结构 | 优点:沉积速率高,微结构具有较高的导热系数和显微硬度、较低的摩擦因数和较小的磨损量与腐蚀速率。缺点:微结构垂直度差、表面粗糙。 |
| 磁场辅助无掩模LECD | Ni质微米尺度圆柱最大深宽比10∶1,Ni质微米尺度微结构深宽比≥7,毫米尺度的Fe、Cu锥形结构,微米尺度的Ni-SiC复合层、 | 成形精度达μm级,Ra=84 nm、面粗糙度Sa=2.94 μm。 | 13 800 μm3/s、 0.67 µm/min | 纳米晶、微米晶 | 简单三维微结构,准三维 结构 | 优点:沉积速率高,微结构具有较高显微硬度和饱和磁化强度、较低的摩擦因数和较小的磨损率与腐蚀电流。缺点:微结构表面粗糙、影响因素多。 |
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| [1] | 吴蒙华1, 姜炳春1, 肖雨晴2, 贾卫平2. 磁场对无掩模定域性电沉积增材制造三维微结构生长模式的影响[J]. 中国机械工程, 2024, 35(11): 2035-2042. |
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