Abstract: A method of dielectrophoresis abrasive flow polishing was proposed for internal surface polishing of thin-walled ceramic workpieces. A non-uniform electric field was arranged on outer surfaces of the ceramic workpieces to be polished, and the abrasive particles were polarized to implement efficient polishing of the ceramic workpiece inner surfaces. Simulation results show that when electrode gap ratio is as 2, SiC abrasive particles have the best dielectrophoresis effectiveness and the most abrasive particles involved in polishing. When initial internal surface roughness value of workpiece Ra is as (208±5)nm, after 10 h polishing, the internal surface roughness value Ra of the workpiecess is as 51nm without dielectrophoresis effectiveness, and that of the workpieces is as 23 nm with dielectrophoresis effectiveness.

Key words: abrasive particle, dielectrophoresis, polishing, ceramics, internal surface

摘要： 针对薄壁陶瓷工件内表面抛光，提出一种基于介电泳效应的磨粒流抛光方法。将非均匀电场布置于陶瓷工件外表面，极化磨粒，实现陶瓷工件内表面高效抛光。仿真分析发现:电极间隙比为2时，SiC磨粒具有最好的介电泳效应，参与抛光的磨粒最多。陶瓷工件初始内表面粗糙度值Ra为(208±5)nm时，抛光10 h后，无介电泳效应的磨粒流抛光工件内表面粗糙度值Ra为51 nm，有介电泳效应的磨粒流抛光工件内表面粗糙度值Ra为23 nm。

关键词: 磨粒, 介电泳效应, 抛光, 陶瓷, 内表面