Principle and Experimental Analysis of a Novel Piezoelectric Inchworm Actuator Based on Rotating Magnet Clamping

doi:10.3969/j.issn.1004-132X.2020.17.007

Abstract

Abstract: To simplify signal control systems and reduce friction of piezoelectric inchworm actuators, a novel piezoelectric inchworm actuator was proposed based on rotating magnet clamping. The actuator utilized DC motor to drive permanent magnet rotation to achieve alternating clamping, and the opposite type laser photoelectric sensors were applied to generate excitation signals to drive piezoelectric stack for linear motions. Relevant parameters of the actuator structure were optimized, and a prototype of the actuator was made and tested. The results show the performance of the proposed piezoelectric inchworm actuator with rotating magnet clamping is stable; the min resolution is as 0.119 μm, the max speed is as 481.43 μm/s, and the max load is as 950 g.

Key words: piezoelectricity, actuator, clamping, inchworm

摘要： 为简化压电尺蠖驱动器信号控制系统并降低摩擦磨损，提出了一种基于旋转磁铁箝位的新型压电尺蠖驱动器。该驱动器利用直流电机带动永磁体转动实现交替箝位，通过激光对射传感器感知永磁体位置产生的激励信号来驱动压电叠堆实现精密直线位移输出。优化了驱动器结构的相关参数，制作了压电尺蠖驱动器样机并对其进行试验测试，结果表明：驱动器性能稳定，最小分辨率为0.119 μm，最高速度和最大载荷分别为481.43 μm/s、950 g。

关键词: 压电, 驱动器, 箝位, 尺蠖

CLC Number:

TN384

LI Jianping1,2;GAO Yunye2;WEN Jianming1,2;MA Jijie1;WANG Renming2. Principle and Experimental Analysis of a Novel Piezoelectric Inchworm Actuator Based on Rotating Magnet Clamping[J]. China Mechanical Engineering, DOI: 10.3969/j.issn.1004-132X.2020.17.007.

李建平1,2;高云叶2;温建明1,2;马继杰1;王仁明2. 基于旋转磁铁箝位的压电尺蠖驱动器理论与试验分析[J]. 中国机械工程, DOI: 10.3969/j.issn.1004-132X.2020.17.007.

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