CLC Number:
CAO Yin-Feng, LIU Zhi-Dong, QIU Meng-Bei, TIAN Zong-Jun, HUANG Yin-Hui.
Study on Vibrating EDM of Deep Micro-hole on High Resistance Silicon
[J]. China Mechanical Engineering, 2011, 22(7): 767-771.
曹银风, 刘志东, 邱明波, 田宗军, 黄因慧.
高阻半导体硅振动式深小孔放电加工研究
[J]. 中国机械工程, 2011, 22(7): 767-771.