China Mechanical Engineering ›› 2021, Vol. 32 ›› Issue (17): 2118-2124.DOI: 10.3969/j.issn.1004-132X.2021.17.013

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Research on Hysteresis Compensation Method of MEMS Piezoelectric Vibratory Platforms

HAO Rui;PENG Bei;ZHOW Wu   

  1. School of Mechanical and Electrical Engineering,University of Electronic Science and Technology of China,Chengdu,611731
  • Online:2021-09-10 Published:2021-09-28

微机电系统压电振动台迟滞补偿方法研究

郝瑞;彭倍;周吴   

  1. 电子科技大学机械与电气工程学院,成都,611731
  • 通讯作者: 周吴(通信作者),男,1981年生,副教授、博士研究生导师。研究方向为微机电系统传感器和执行器。发表论文20余篇。E-mail:zhouwu916@uestc.edu.cn。
  • 作者简介:郝瑞,男,1988年生,博士研究生。研究方向为MEMS压电执行器。E-mail:1351440347@qq.com。
  • 基金资助:
    国家自然科学基金(52075082,51975107);
    四川省科技厅区域创新合作项目(2020YFQ0017)

Abstract: The MEMS piezoelectric vibratory platforms, as the new candidate for recalibration platforms, could provide the on-chip physical impulse environment to recalibrate the accelerometers by providing a continuous and stable acceleration signals. However, the piezoelectric material used for actuation exhibited clear hysteresis characteristics which seriously affected the stability and the continuity of the harmonic vibration signals. According to the vibratory platform vibration performance, a piezoelectric hysteresis model was established based on polynomial fitting, and the control of platform and compensation of acceleration were realized by combining the feedforward controller and feedback controller. The experimental results show that the maximum acceleration error is reduced from 1. 3g to 0. 05g under the driving conditions of 10 V(317 Hz)sinusoidal voltage. 

Key words: micro-electro-mechanical system(MEMS)piezoelectric vibratory platform, piezoelectric hysteresis model, compound control, accelerometer self-calibration

摘要: 微机电系统(MEMS)压电振动台作为加速度传感器现场标定平台的新秀,能够提供片上物理驱动环境,为加速度传感器的快速重新标定提供持续稳定的加速度信号,然而用于压电振动台驱动的压电材料具有明显的迟滞特性,严重影响平台振动信号的稳定性和连续性。基于上述振动台振动特性,建立基于多项式拟合的压电迟滞模型,采用前馈控制和反馈控制相结合的复合控制方法对压电振动台进行控制和加速度滞后补偿。实验结果表明,在10 V(317 Hz)正弦电压激励下,MEMS压电振动台提供的简谐振动信号的加速度最大误差从1.3g降到了0.05g。

关键词: MEMS压电振动平台, 压电迟滞模型, 复合控制, 加速度传感器自标定

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